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1. (WO2019046631) GLASSY CARBON PROBE AND MICROFABRICATION METHOD
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Pub. No.: WO/2019/046631 International Application No.: PCT/US2018/048938
Publication Date: 07.03.2019 International Filing Date: 30.08.2018
IPC:
A61B 5/02 (2006.01) ,A61B 5/0492 (2006.01) ,A61B 17/74 (2006.01) ,G01R 1/06 (2006.01) ,H01L 21/31 (2006.01) ,H01L 21/768 (2006.01)
A HUMAN NECESSITIES
61
MEDICAL OR VETERINARY SCIENCE; HYGIENE
B
DIAGNOSIS; SURGERY; IDENTIFICATION
5
Measuring for diagnostic purposes; Identification of persons
02
Measuring pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography; Heart catheters for measuring blood pressure
A HUMAN NECESSITIES
61
MEDICAL OR VETERINARY SCIENCE; HYGIENE
B
DIAGNOSIS; SURGERY; IDENTIFICATION
5
Measuring for diagnostic purposes; Identification of persons
04
Measuring bioelectric signals of the body or parts thereof
0488
Electromyography
0492
Electrodes specially adapted therefor, e.g. needle electrodes
A HUMAN NECESSITIES
61
MEDICAL OR VETERINARY SCIENCE; HYGIENE
B
DIAGNOSIS; SURGERY; IDENTIFICATION
17
Surgical instruments, devices or methods, e.g. tourniquets
56
Surgical instruments or methods for treatment of bones or joints; Devices specially adapted therefor
58
for osteosynthesis, e.g. bone plates, screws or the like
68
Internal fixation devices
74
Devices for the head of the femur
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
06
Measuring leads; Measuring probes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
31
to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After-treatment of these layers; Selection of materials for these layers
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
71
Manufacture of specific parts of devices defined in group H01L21/7086
768
Applying interconnections to be used for carrying current between separate components within a device
Applicants:
SAN DIEGO STATE UNIVERSITY RESEARCH FOUNDATION [US/US]; 5500 Campanile Drive SSE 1410B San Diego, CA 92182-8220, US
Inventors:
KASSEGNE, Sanuel, K.; US
NIMBALKAR, Surabhi; US
BALASUBRAMANI, Arvind; US
Agent:
MATHEWS, Glen, T.; US
LISA, Adams; US
AZRIN, Linda, B.; US
AMENDT, Kevin, C.; US
BAUER, John, A.; US
Priority Data:
62/552,30430.08.2017US
Title (EN) GLASSY CARBON PROBE AND MICROFABRICATION METHOD
(FR) SONDE EN CARBONE VITREUX ET PROCÉDÉ DE MICROFABRICATION
Abstract:
(EN) A probe device is disclosed that includes one or more insulating layers and a glassy carbon layer. The glassy carbon layer includes one or more channels. Each channel includes a microstructure, which may include an electrode region, interconnect region, and bump pad region. The electrode region may be placed in contact with a human or animal patient or test subject and used to collect or deliver signals in applications such as electrocorticography (ECoG), electromyography (EMG), and neural stimulation. A method of making a probe includes depositing a glassy carbon precursor on a substrate, patterning the precursor using photolithography, pyrolyzing the precursor to allow the formation of glassy carbon, and depositing one or more insulating layers.
(FR) L'invention concerne un dispositif sonde qui comprend une ou plusieurs couches isolantes et une couche de carbone vitreux. La couche de carbone vitreux comprend un ou plusieurs canaux. Chaque canal comprend une microstructure, qui peut comprendre une région d'électrode, une région d'interconnexion et une région de plot en bosse. La région d'électrode peut être placée en contact avec un patient humain ou animal ou un sujet de test et utilisée pour collecter ou délivrer des signaux dans des applications telles que l'électrocorticographie (ECoG), l'électromyographie (EMG) et la stimulation neuronale. Un procédé de fabrication d'une sonde comprend le dépôt d'un précurseur de carbone vitreux sur un substrat, la formation de motifs du précurseur à l'aide de la photolithographie, la pyrolyse du précurseur pour permettre la formation de carbone vitreux, et le dépôt d'une ou de plusieurs couches isolantes.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)