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1. (WO2019046419) VERTICAL PROBE ARRAY HAVING A TILED MEMBRANE SPACE TRANSFORMER
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Pub. No.: WO/2019/046419 International Application No.: PCT/US2018/048534
Publication Date: 07.03.2019 International Filing Date: 29.08.2018
IPC:
G01R 1/06 (2006.01) ,G01R 1/07 (2006.01) ,G01R 31/28 (2006.01)
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
06
Measuring leads; Measuring probes
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
1
Details of instruments or arrangements of the types covered by groups G01R5/-G01R13/122
02
General constructional details
06
Measuring leads; Measuring probes
067
Measuring probes
07
Non contact-making probes
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28
Testing of electronic circuits, e.g. by signal tracer
Applicants:
FORMFACTOR, INC. [US/US]; 7005 Southfront Road Livermore, CA 94551, US
Inventors:
ELDRIDGE, Benjamin, N.; US
WATANABE, Masanori; JP
KUHNERT, Scott; US
COUSSENS, Jeffrey; US
Agent:
LODENKAMPER, Robert; US
Priority Data:
62/552,23230.08.2017US
Title (EN) VERTICAL PROBE ARRAY HAVING A TILED MEMBRANE SPACE TRANSFORMER
(FR) DISPOSITION DE SONDES VERTICALES COMPORTANT UN TRANSFORMATEUR SPATIAL À MEMBRANE JUXTAPOSÉ
Abstract:
(EN) Vertical probe heads having a space transformer laterally tiled into several sections are provided. This change relative to conventional approaches improves manufacturing yield. These probe heads can include metal ground planes, and in embodiments where the ground planes are provided as separate metal plates parallel to the guide plates, the metal plates can also be laterally tiled into several sections. Such tiling of metal plates improves manufacturing yield and alleviates thermal mismatch issues. Probes are not mechanically connected to the space transformer, which facilitates replacement of individual probes of an array.
(FR) L'invention concerne des têtes de sondes verticales pourvues d'un transformateur spatial juxtaposé latéralement en plusieurs sections. Ce changement par rapport à des approches classiques améliore le rendement de fabrication. Ces têtes de sondes peuvent comprendre des plans de masse métalliques, et dans des modes de réalisation où les plans de masse sont fournis sous la forme de plaques métalliques séparées parallèles aux plaques de guidage, les plaques métalliques peuvent également être juxtaposées latéralement en plusieurs sections. Une telle juxtaposition des plaques métalliques améliore le rendement de fabrication et atténue les problèmes de désadaptation thermique. Les sondes ne sont pas reliées mécaniquement au transformateur spatial, ce qui facilite le remplacement de sondes individuelles d'une matrice.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)