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1. (WO2019046305) BALANCING RF CIRCUIT AND CONTROL FOR A CROSS-COUPLED SIMO DISTRIBUTION NETWORK
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Pub. No.: WO/2019/046305 International Application No.: PCT/US2018/048351
Publication Date: 07.03.2019 International Filing Date: 28.08.2018
IPC:
H01J 37/32 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
Applicants:
MKS INSTRUMENTS, INC. [US/US]; 2 Tech Drive, Suite 201 Andover, MA 01810, US
Inventors:
COUMOU, David, J.; US
BROWN, Dennis, M.; US
JANG, Jeongseok; KR
HUH, Jin; KR
Agent:
LAFATA, Joseph, M.; US
AMBROSE, John; US
AQUINO, Damian; US
BENSON, Tyson, B.; US
BERBERICH, Jeanette, M.; US
BRENNAN, Michael, P.; US
BRITT, Nancy, K.; US
BROCK, Christopher, M.; US
CASTELLANO, John, A., III; US
CAUBLE, Christopher, M.; US
CHANG, Alex, C.; US
CHAPP, Jeffrey, J.; US
CHO, David, J.; US
CUTLER, Matthew, L.; US
DALEY, Donald, J.; US
DEAVER, Darin, W.; US
DELASSUS, Gregory, S.; US
DOERR, Michael, P.; US
DOWDY, Stephanie, L.; US
DRYSDALE, Nicholas, S.; US
ELCHUK, Mark, D.; US
ERJAVAC, Stanley, M.; US
FALCOFF, Monte, L.; US
FITZPATRICK, John; US
FORBIS, Glenn, E.; US
FOSS, Stephen, J.; US
FRANKLIN, Clarence. C.; US
FRENTRUP, Mark, A.; US
FULLER, Roland, III; US
FUSSNER, Anthony, G.; US
GAMBLE, Michael, D.; US
HEIST, Jason, A.; US
HILTON, Michael, E.; US
HOYT, Blair, M.; US
KELLER, Paul, A.; US
KESKAR, Hemant; US
KIM, Paul, M.; US
KIM, Sung, Pil; US
KORAL, Elisabeth; US
KOTSIS, Damian, H.; US
KOZU, Kiyoshi; US
LEE, Kisuk; US
LUCHSINGER, James, B.; US
MACINTYRE, Timothy, D.; US
MALINZAK, Michael; US
MARTIN, Timothy, J.; US
MASSEY, Ryan, W.; US
MEYER, Greg; US
MIERZWA, Kevin; US
MILLER, Christopher, K.; US
MOUSTAKAS, George, D.; US
NABI, Tarik, M.; US
NYE, Michael; US
ODELL, Elizabeth, D.; US
OLSON, Stephen, T.; US
PANKA, Brian, G.; US
RAKERS, Leanne; US
RICHMOND, Derek; US
ROBINSON, Douglas, A.; US
SCHIANO, Thomas, E.; US
SCHIVLEY, Gregory, G.; US
SCHMIDT, Michael, J.; US
SEITZ, Brent, G.; US
SIMINSKI, Robert, M.; US
SMITH, Corey, E.; US
SMITH, Michael, L.; US
SNYDER, Jeffrey, L.; US
SUTER, David, L.; US
TAYLOR, Michael, L.; US
TAYLOR, W., R., Duke; US
TEICH, Michael, L.; US
THOMAS, Michael, J.; US
TUCKER, David, J., Jr.; US
UTYKANSKI, David, P.; US
VARCO, Michael, A.; US
WADE, Bryant, E.; US
WALKER, Donald, G.; US
WALSH, JR., Joseph, E.; US
WANGEROW, Steven; US
WARNER, Richard, W.; US
WAXMAN, Andrew, M.; US
WELCH, Gerald, T.; US
WHEELOCK, Bryan, K.; US
WIGGINS, Michael, D.; US
WOODSIDE-WOJTALA, Jennifer; US
YACURA, Gary, D.; US
ZALOBSKY, Michael, D.; US
Priority Data:
16/112,05524.08.2018US
62/551,63729.08.2017US
Title (EN) BALANCING RF CIRCUIT AND CONTROL FOR A CROSS-COUPLED SIMO DISTRIBUTION NETWORK
(FR) CIRCUIT RF D'ÉQUILIBRAGE, ET COMMANDE D'UN RÉSEAU DE DISTRIBUTION SIMO À COUPLAGE CROISÉ
Abstract:
(EN) A single input multiple output plasma control system includes a splitter that receives a single input and generates multiple outputs. Each output from the splitter is provided to a load. The splitter includes branch circuits connected between selected splitter outputs. The branch circuits control voltage, current, power, frequency, or phase between each branch to enable controlling a predetermined relationship between the voltage, current, power, impedance, frequency, or phase measured at each load.
(FR) L'invention concerne un système de commande de plasma à entrée unique et sorties multiples comprenant un diviseur qui reçoit une entrée unique et génère des sorties multiples. Chaque sortie du diviseur est fournie à une charge. Le diviseur comprend des circuits de dérivation connectés entre des sorties de diviseur sélectionnées. Les circuits de dérivation commandent la tension, le courant, la puissance, la fréquence, ou la phase entre chaque branche pour permettre de commander une relation prédéterminée entre la tension, le courant, la puissance, l'impédance, la fréquence, ou la phase mesurée à chaque charge.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)