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1. (WO2019045537) SUPPORT STRUCTURE
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Pub. No.: WO/2019/045537 International Application No.: PCT/KR2018/010196
Publication Date: 07.03.2019 International Filing Date: 03.09.2018
IPC:
H01L 21/687 (2006.01) ,H01L 21/683 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
687
using mechanical means, e.g. chucks, clamps or pinches
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
주성엔지니어링(주) JUSUNG ENGINEERING CO., LTD. [KR/KR]; 경기도 광주시 오포읍 오포로 240 240, Opo-ro, Opo-eup Gwangju-si Gyeonggi-do 12773, KR
Inventors:
우람 WOO, Ram; KR
김기범 KIM, Ki Bum; KR
김희정 KIM, Hee Jeong; KR
배종태 BAE, Jong Tae; KR
이길제 LEE, Gil Je; KR
하윤규 HA, Yun Gyu; KR
Agent:
이승찬 LEE, Seung Chan; KR
Priority Data:
10-2017-011254404.09.2017KR
Title (EN) SUPPORT STRUCTURE
(FR) STRUCTURE DE SUPPORT
(KO) 지지구조체
Abstract:
(EN) One embodiment of a support structure can comprise: a pin insertion member having a hollow portion, which is formed in the longitudinal direction and into which a substrate support pin is inserted; a plurality of support members provided in the circumferential direction at the upper and lower parts of the pin insertion member, and making rolling contact with the substrate support pin so as to support the longitudinal movement of the pin insertion member of the substrate support pin; and a coupling member, which is coupled to the outer peripheral surface of the pin insertion member, encompasses the plurality of support members so as to press the support members in the diametrical direction of the pin insertion member, and couples the plurality of support members to the pin insertion member.
(FR) L'invention concerne un mode de réalisation d'une structure de support qui peut comprendre : un élément d'insertion de broche ayant une partie creuse, qui est formée dans la direction longitudinale et dans laquelle une broche de support de substrat est insérée ; une pluralité d'éléments de support disposés dans la direction circonférentielle au niveau des parties supérieure et inférieure de l'élément d'insertion de broche, et établissant un contact de roulement avec la broche de support de substrat de manière à supporter le mouvement longitudinal de l'élément d'insertion de broche de la broche de support de substrat ; et un élément de couplage, qui est couplé à la surface périphérique externe de l'élément d'insertion de broche, englobe la pluralité d'éléments de support de manière à presser les éléments de support dans la direction diamétrale de l'élément d'insertion de broche, et couple la pluralité d'éléments de support à l'élément d'insertion de broche.
(KO) 지지구조체의 일 실시예는, 기판지지핀이 삽입되는 중공이 길이방향으로 형성되는 핀삽입부재; 상기 핀삽입부재의 상부 및 하부에 원주방향으로 복수로 구비되고, 상기 기판지지핀과 롤링접촉하여 상기 기판지지핀의 상기 핀삽입부재의 길이방향 이동을 지지하는 지지부재; 및 상기 핀삽입부재 외주면에 결합하며, 복수의 상기 지지부재를 둘러싸도록 구비되어 상기 지지부재를 상기 핀삽입부재의 직경방향으로 가압하고, 복수의 상기 지지부재를 상기 핀삽입부재에 결합하는 결합부재를 포함할 수 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)