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1. (WO2019045375) MASK FOR DEPOSITION OF METALLIC MATERIAL FOR DEPOSITING OLED PIXELS AND MANUFACTURING METHOD THEREOF
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Pub. No.: WO/2019/045375 International Application No.: PCT/KR2018/009813
Publication Date: 07.03.2019 International Filing Date: 24.08.2018
IPC:
H01L 51/56 (2006.01) ,H01L 51/00 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
56
Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
Applicants:
엘지이노텍 주식회사 LG INNOTEK CO., LTD. [KR/KR]; 서울시 중구 후암로 98 98, Huam-ro Jung-gu Seoul 04637, KR
Inventors:
김해식 KIM, Hae Sik; KR
백지흠 PAIK, Jee Heum; KR
Agent:
허용록 HAW, Yong Noke; KR
Priority Data:
10-2017-010972429.08.2017KR
Title (EN) MASK FOR DEPOSITION OF METALLIC MATERIAL FOR DEPOSITING OLED PIXELS AND MANUFACTURING METHOD THEREOF
(FR) MASQUE DE DÉPÔT DE MATÉRIAU MÉTALLIQUE PERMETTANT LE DÉPÔT DE PIXELS OLED ET PROCÉDÉ DE FABRICATION ASSOCIÉ
(KO) OLED 화소 증착을 위한 금속재의 증착용 마스크 및 이의 제조방법
Abstract:
(EN) A mask for deposition of a metallic material for depositing OLED pixels according to an embodiment, wherein the mask for deposition comprises a deposition region for forming a deposition pattern and a non-deposition region other than the deposition region, the deposition region comprises a plurality of effective portions spaced apart in a longitudinal direction and non-effective portions other than the effective portions, an effective portion comprises a plurality of small surface holes which are formed on one surface; a plurality of large surface holes which are formed on the other surface opposite to the one surface; through-holes which communicate with the small surface holes and the large surface holes; and island portions between the plurality of through-holes, the diameter of the through-hole is 33μm or less, a resolution of 500 PPI or more, in which the spacing between the through-holes is 48μm or less, is provided, an inclination angle of the small surface holes with respect to the one surface is 70° to 89°, and the inclination curvature radius of the small surface holes with respect to the one surface is 3μm to 86μm.
(FR) L'invention concerne, dans un mode de réalisation, un masque de dépôt d'un matériau métallique permettant le dépôt de pixels OLED, le masque de dépôt comprenant une région de dépôt permettant de former un motif de dépôt et une région de non-dépôt autre que la région de dépôt, la région de dépôt comprenant une pluralité de parties efficaces espacées dans une direction longitudinale et des parties non efficaces autres que les parties efficaces, une partie efficace comprenant une pluralité de petits trous de surface qui sont formés sur une surface ; une pluralité de grands trous de surface qui sont formés sur l'autre surface opposée à la surface ; des trous traversants qui communiquent avec les petits trous de surface et les grands trous de surface ; et des parties d'îlot entre la pluralité de trous traversants, le diamètre du trou traversant étant de 33 µm ou moins, une résolution de 500 PPI ou plus, l'espacement entre les trous traversants étant de 48 µm ou moins, étant prévue, un angle d'inclinaison des petits trous de surface par rapport à la surface étant de 70° à 89°, et le rayon de courbure d'inclinaison des petits trous de surface par rapport à la surface étant de 3 µm à 86 µm.
(KO) 실시예에 따른 OLED 화소 증착을 위한 금속재의 증착용 마스크에 있어서, 상기 증착용 마스크는 증착 패턴을 형성하기 위한 증착 영역 및 증착 영역 이외의 비증착 영역을 포함하고, 상기 증착 영역은 길이 방향으로 이격된 복수개의 유효부 및 상기 유효부 이외의 비유효부를 포함하고, 상기 유효부는, 일면 상에 형성된 다수의 소면공; 상기 일면과 반대되는 타면상에 형성된 다수의 대면공; 상기 소면공과 상기 대면공을 연통하는 관통홀; 및 상기 다수의 관통홀 사이의 아일랜드부;를 포함하고, 상기 관통홀의 직경은 33㎛이하이고, 상기 관통홀 간의 간격이 48㎛ 이하인 500PPI 이상의 해상도를 가지며, 상기 일면에 대한 소면공의 경사각은 70° 내지 89°이고, 상기 일면에 대한 소면공의 경사 곡률반경은 3㎛ 내지 86㎛이다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)