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1. (WO2019045240) METHOD FOR PRODUCING FRAME-INTEGRATED MASK
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Pub. No.: WO/2019/045240 International Application No.: PCT/KR2018/007180
Publication Date: 07.03.2019 International Filing Date: 25.06.2018
IPC:
H01L 51/56 (2006.01) ,H01L 51/00 (2006.01) ,H01L 21/02 (2006.01) ,C23C 14/04 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
56
Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04
Coating on selected surface areas, e.g. using masks
Applicants:
주식회사 티지오테크 TGO TECH. CORPORATION [KR/KR]; 경기도 용인시 기흥구 공세로 140-11 140-11, Gongse-ro, Giheung-gu Yongin-si Gyeonggi-do 17085, KR
Inventors:
장택용 JANG, Taek Yong; KR
이유진 LEE, Yoo Jin; KR
Agent:
김한 KIM, Han; KR
Priority Data:
10-2017-011206801.09.2017KR
10-2018-001206631.01.2018KR
Title (EN) METHOD FOR PRODUCING FRAME-INTEGRATED MASK
(FR) PROCÉDÉ DE PRODUCTION D'UN MASQUE À CADRE INTÉGRÉ
(KO) 프레임 일체형 마스크의 제조 방법
Abstract:
(EN) The present invention relates to a method for producing a frame-integrated mask. A method for producing a frame-integrated mask according to the present invention is a method for producing a frame-integrated mask in which a mask (100) and a frame (200) for supporting the mask (100) are integrally formed, the method comprising the steps of: (a) providing a frame (200) having a plurality of mask cell (C) areas along at least one direction of a first direction and a second direction perpendicular to the first direction; (b) providing a mask (100) having a plurality of mask patterns (P) formed thereon; (c) matching the mask (100) with one mask cell (C) area of the frame (200); and (d) adhering (W) at least a part of the edge of the mask (100) to the frame (200).
(FR) La présente invention concerne un procédé de production d'un masque à cadre intégré. Un procédé de production d'un masque à cadre intégré selon la présente invention est un procédé de production d'un masque à cadre intégré dans lequel un masque (100) et un cadre (200) permettant de maintenir le masque (100) sont formés d'un seul tenant, le procédé comprenant les étapes suivantes consistant : (a) à fournir un cadre (200) comprenant une pluralité de zones de cellules de masque (C) le long d'au moins une direction d'une première direction et d'une seconde direction perpendiculaire à la première direction; (b) à fournir un masque (100) sur lequel sont formés une pluralité de motifs de masque (P); (c) à mettre en correspondance le masque (100) avec une zone de cellules de masque (C) du cadre (200); et (d) à coller (W) au moins une partie du bord du masque (100) au cadre (200).
(KO) 본 발명은 프레임 일체형 마스크의 제조 방법에 관한 것이다. 본 발명에 따른 프레임 일체형 마스크의 제조 방법은, 마스크(100)와 마스크(100)를 지지하는 프레임(200)이 일체로 형성된 프레임 일체형 마스크의 제조 방법으로서, (a) 제1 방향, 제1 방향에 수직인 제2 방향 중 적어도 하나의 방향을 따라 복수의 마스크 셀(C) 영역을 구비하는 프레임(200)을 제공하는 단계, (b) 복수의 마스크 패턴(P)이 형성된 마스크(100)를 제공하는 단계, (c) 마스크(100)를 프레임(200)의 하나의 마스크 셀(C) 영역에 대응하는 단계, 및 (d) 마스크(100)의 테두리의 적어도 일부를 프레임(200)에 접착(W)하는 단계를 포함하는 것을 특징으로 한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)