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1. (WO2019045155) ACTIVE-VIBRATION DAMPING SYSTEM AND METHOD FOR CONTROLLING DISTURBANCE OF TRANSFER APPARATUS BY USING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/045155 International Application No.: PCT/KR2017/009725
Publication Date: 07.03.2019 International Filing Date: 05.09.2017
IPC:
F16F 15/027 (2006.01) ,F16F 15/023 (2006.01) ,G05D 19/02 (2006.01)
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16
ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
F
SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
15
Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
02
Suppression of vibrations of non-rotating, e.g. reciprocating, systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating system
023
using fluid means
027
comprising control arrangements
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16
ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
F
SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
15
Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
02
Suppression of vibrations of non-rotating, e.g. reciprocating, systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating system
023
using fluid means
G PHYSICS
05
CONTROLLING; REGULATING
D
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
19
Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
02
characterised by the use of electric means
Applicants:
주식회사 대일시스템 DAEIL SYSTEM CO., LTD. [KR/KR]; 경기도 용인시 처인구 원삼면 맹리로 40 40, Maengni-ro, Wonsam-myeon, Cheoin-gu Yongin-si Gyeonggi-do 17166, KR
아주대학교 산학협력단 AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION [KR/KR]; 경기도 수원시 영통구 월드컵로 206 206, World cup-ro, Yeongtong-gu Suwon-si Gyeonggi-do 16499, KR
Inventors:
김광산 KIM, Kwang San; KR
최성원 CHOI, Sung Won; KR
최영만 CHOI, Young Man; KR
Agent:
특허법인 아주 AJU INTERNATIONAL LAW & PATENT GROUP; 서울시 서초구 사임당로 174, 강남미래타워 12-13층 12-13th Floor, Gangnam Mirae Tower, 174 Saimdang- Ro Seocho-gu Seoul 06627, KR
Priority Data:
10-2017-010859728.08.2017KR
Title (EN) ACTIVE-VIBRATION DAMPING SYSTEM AND METHOD FOR CONTROLLING DISTURBANCE OF TRANSFER APPARATUS BY USING SAME
(FR) SYSTÈME D'AMORTISSEMENT DE VIBRATION ACTIF ET PROCÉDÉ DE CONTRÔLE DE PERTURBATION D'APPAREIL DE TRANSFERT UTILISANT CELUI-CI
(KO) 능동형 제진장치 및 이를 이용한 이송장치의 외란 제어방법
Abstract:
(EN) The present invention relates to an active-vibration damping system and, specifically, to: an active-vibration damping system capable of quickly removing vibration by applying offset force to the disturbance generated by the driving of an upper stage or a gantry; and a method for controlling disturbance of a transfer apparatus by using the same. The active-vibration damping system (1000) of the present invention is formed in a structure in which a vibration damping mount (1500) positioned between a base (1200) and a lower frame (1300) has: a displacement sensor (1580) positioned under a displacement sensor target (1512), provided at an air spring upper plate (1511) of an air spring (1510), so as to sense a gap with the displacement sensor target (1512), thereby sensing, in real time, a gap formed between the lower surface of the air spring upper plate (1511) and the upper surface of a clamp ring (1514) which are assembled at the upper part of an air spring chamber (1513); and a servo valve (1590) receiving a signal from a vibration damping system controller (1400) according to a value of the displacement sensor so as to be operated in real time, thereby supplying air, and thus enables the height of the air spring (1510) to be adjusted in real time.
(FR) La présente invention concerne un système d'amortissement de vibration actif et, spécifiquement, un système d'amortissement de vibration actif permettant d'éliminer rapidement une vibration par application d'une force de décalage à la perturbation générée par l'entraînement d'un étage supérieur ou d'un portique; et un procédé de contrôle de perturbation d'un appareil de transfert au moyen de celui-ci. Le système d'amortissement de vibration actif (1000) de la présente invention est formé dans une structure dans laquelle un support d'amortissement de vibration (1500) positionné entre une base (1200) et un cadre inférieur (1300) comporte : un capteur de déplacement (1580) positionné sous une cible de capteur de déplacement (1512), disposée au niveau d'une plaque supérieure de ressort pneumatique (1511) d'un ressort pneumatique (1510), de façon à détecter un espacement avec la cible de capteur de déplacement (1512), de façon à détecter, en temps réel, un espacement formé entre la surface inférieure de la plaque supérieure de ressort pneumatique (1511) et la surface supérieure d'une bague de serrage (1514) qui sont assemblées au niveau de la partie supérieure d'une chambre de ressort pneumatique (1513); et une servo-vanne (1590) recevant un signal provenant d'un dispositif de commande de système d'amortissement de vibration (1400) en fonction d'une valeur du capteur de déplacement de façon à être actionné en temps réel, permettant ainsi de distribuer de l'air, et permet ainsi d'ajuster en temps réel la hauteur du ressort pneumatique (1510).
(KO) 본 발명은 능동형 제진장치에 관한 것으로, 특히 상부 스테이지 혹은 갠트리의 구동에 의한 외란에 대해 상쇄력을 가함으로서 진동을 빠르게 제거할 수 있도록 된 능동형 제진장치 및 이를 이용한 이송장치의 외란 제어방법에 관한 것이다. 본 발명의 능동형 제진장치(1000)는, 베이스(1200)와 하부프레임(1300)의 사이에 위치한 제진마운트(1500)는, 에어스프링(1510)의 에어스프링상판(1511)에 설치한 변위센서타켓(1512)의 하부에 위치하도록 설치되어 변위센서타켓(1512)과의 간격을 감지하도록 설치함으로서 에어스프링상판(1511)의 하부면과 에어스프링챔버(1513)의 상부에 조립된 클램프링(1514)의 상부면과의 떨어진 간극을 실시간으로 감지하도록 된 변위센서(1580)와, 상기 변위센서의 값에 따라 제진장치제어기(1400)에서 신호를 받아 실시간으로 작동하여 에어를 공급함으로서 에어스프링(1510)의 높낮이를 실시간으로 조절할 수 있도록 된 서보밸브(1590)를 갖춘 구조로 되어 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)