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1. (WO2019044148) SUPPORT GLASS SUBSTRATE AND LAMINATED SUBSTRATE USING SAME
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Pub. No.: WO/2019/044148 International Application No.: PCT/JP2018/024617
Publication Date: 07.03.2019 International Filing Date: 28.06.2018
IPC:
H01L 21/02 (2006.01) ,C03C 23/00 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
23
Other surface treatment of glass not in the form of fibres or filaments
Applicants:
日本電気硝子株式会社 NIPPON ELECTRIC GLASS CO., LTD. [JP/JP]; 滋賀県大津市晴嵐二丁目7番1号 7-1, Seiran 2-chome, Otsu-shi Shiga 5208639, JP
Inventors:
鈴木 良太 SUZUKI Ryota; JP
Priority Data:
2017-16651731.08.2017JP
2018-06110628.03.2018JP
Title (EN) SUPPORT GLASS SUBSTRATE AND LAMINATED SUBSTRATE USING SAME
(FR) SUBSTRAT DE VERRE DE SUPPORT ET SUBSTRAT STRATIFIÉ L'UTILISANT
(JA) 支持ガラス基板及びこれを用いた積層基板
Abstract:
(EN) The present invention provides a support glass substrate for supporting a pre-singulation substrate, characterized in that the support glass substrate comprises an information identification section having dots as constituent units on the surface of the support glass substrate and in that the mean length of cracks extending from each of the dots in the surface direction is no greater than 350 μm.
(FR) La présente invention concerne un substrat de verre de support pour supporter un substrat de pré-isolement, caractérisé en ce que le substrat de verre de support comprend une section d'identification d'informations ayant des points en tant qu'unités constitutives sur la surface du substrat de verre de support et en ce que la longueur moyenne de fissures s'étendant à partir de chacun des points dans la direction de surface ne dépasse pas 350 µm.
(JA) 本発明の支持ガラス基板は、加工基板を支持するための支持ガラス基板において、支持ガラス基板の表面にドットを構成単位とする情報識別部を備え、且つドットから伸張するクラックの表面方向の平均長さが350μm以下であることを特徴とする。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)