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1. (WO2019043570) SINGLE CRYSTALLINE DIAMOND DIFFRACTIVE OPTICAL ELEMENTS AND METHOD OF FABRICATING THE SAME
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Pub. No.: WO/2019/043570 International Application No.: PCT/IB2018/056547
Publication Date: 07.03.2019 International Filing Date: 28.08.2018
IPC:
C30B 29/04 (2006.01) ,C30B 33/12 (2006.01) ,G02B 1/02 (2006.01) ,G02B 5/18 (2006.01) ,G02B 27/10 (2006.01)
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
29
Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
02
Elements
04
Diamond
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
33
After-treatment of single crystals or homogeneous polycrystalline material with defined structure
08
Etching
12
in gas atmosphere or plasma
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
1
Optical elements characterised by the material of which they are made; Optical coatings for optical elements
02
made of crystals, e.g. rock-salt, semiconductors
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5
Optical elements other than lenses
18
Diffracting gratings
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
10
Beam splitting or combining systems
Applicants:
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL) [CH/CH]; EPFL-TTO EPFL Innovation Park J 1015 Lausanne, CH
Inventors:
QUACK, Niels; CH
KISS, Marcell; CH
GRAZIOSI, Teodoro; CH
Agent:
BYRNE, Declan; CH
Priority Data:
PCT/IB2017/05520830.08.2017IB
Title (EN) SINGLE CRYSTALLINE DIAMOND DIFFRACTIVE OPTICAL ELEMENTS AND METHOD OF FABRICATING THE SAME
(FR) ÉLÉMENTS OPTIQUES À DIFFRACTION EN DIAMANT MONOCRISTALLIN ET LEUR PROCÉDÉ DE FABRICATION
Abstract:
(EN) The present invention concerns a single crystalline diamond optical element production method. The method includes the steps of: ‐ providing a single crystalline diamond substrate or layer; ‐ applying a mask layer to the single crystalline diamond substrate or layer; ‐ forming at least one or a plurality of indentations or recesses through the mask layer to expose a portion or portions of the single crystalline diamond substrate or layer; and ‐ etching the exposed portion or portions of the single crystalline diamond substrate or layer.
(FR) La présente invention concerne un procédé de production d'un élément optique en diamant monocristallin. Le procédé consiste à fournir un substrat ou une couche de diamant monocristallin ; à appliquer une couche de masque sur le substrat ou la couche de diamant monocristallin ; à former au moins une ou plusieurs indentations ou évidements à travers la couche de masque pour exposer une ou des parties du substrat ou de la couche de diamant monocristallin ; et à graver la ou les parties exposées du substrat ou de la couche de diamant monocristallin.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)