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1. (WO2019042682) APPARATUS FOR AND METHOD CLEANING A SUPPORT INSIDE A LITHOGRAPHY APPARATUS

International Application Status
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22.10.2019International Application Status ReportHTML, PDF, XMLPDF, XML


Published International Application
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07.03.2019Initial Publication with ISR( (A1 10/2019))PDF (35p.)PDF (35p.), ZIP(XML + TIFFs)


Search and Examination-Related Documents
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07.03.2019(ISA/237) Written Opinion of the International Searching AuthorityPDF (6p.)PDF (6p.), ZIP(XML + TIFFs), FullText
07.03.2019Search StrategyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
07.03.2019(ISA/210) International Search ReportPDF (4p.)PDF (4p.), ZIP(XML + TIFFs), FullText


Related Documents on file at the International Bureau
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19.03.2019(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
07.03.2019(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
07.03.2019Application Body as FiledPDF (31p.)PDF (31p.), ZIP(XML + TIFFs)
International application as filed
07.03.2019(RO/101) Request formPDF (4p.)
07.03.2019(IB/304) Notification Concerning Submission or Transmittal of Priority DocumentPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
07.03.2019Validation LogPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
07.03.2019(IB/301) Notification of receipt of record copyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
07.03.2019Priority DocumentPDF (46p.)PDF (46p.), ZIP(XML + TIFFs)