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1. (WO2019042565) HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER INCLUDING THE HOLDING ARRANGEMENT, PROCESSING SYSTEM EMPLOYING THE CARRIER, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE FROM A HOLDING ARRANGEMENT
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Pub. No.: WO/2019/042565 International Application No.: PCT/EP2017/071999
Publication Date: 07.03.2019 International Filing Date: 01.09.2017
IPC:
C23C 14/50 (2006.01) ,B23Q 3/08 (2006.01) ,C23C 16/458 (2006.01) ,F16M 13/02 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
50
Substrate holders
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
Q
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
3
Devices holding, supporting, or positioning, work or tools, of a kind normally removable from the machine
02
for mounting on a work-table, tool-slide, or analogous part
06
Work-clamping means
08
other than mechanically-actuated
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44
characterised by the method of coating
458
characterised by the method used for supporting substrates in the reaction chamber
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16
ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
M
FRAMES, CASINGS, OR BEDS, OF ENGINES OR OTHER MACHINES OR APPARATUS, NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS OR SUPPORTS
13
Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles
02
for supporting on, or attaching to, an object, e.g. tree, gate, window-frame, cycle
Applicants:
LAU, Simon [DE/DE]; DE (US)
APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
Inventors:
LAU, Simon; DE
Agent:
ZIMMERMANN & PARTNER PATENTANWÄLTE MBB; Josephspitalstr. 15 80331 München, DE
Priority Data:
Title (EN) HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER INCLUDING THE HOLDING ARRANGEMENT, PROCESSING SYSTEM EMPLOYING THE CARRIER, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE FROM A HOLDING ARRANGEMENT
(FR) AGENCEMENT DE RETENUE POUR RETENIR UN SUBSTRAT, SUPPORT COMPRENANT L'AGENCEMENT DE RETENUE, SYSTÈME DE TRAITEMENT UTILISANT LE SUPPORT, PROCÉDÉ DE RETENUE D'UN SUBSTRAT, ET PROCÉDÉ DE LIBÉRATION D'UN SUBSTRAT À PARTIR D'UN AGENCEMENT DE RETENUE
Abstract:
(EN) The present disclosure relates to a holder for holding a substrate. The holder includes a surface configured to face the substrate, and an adhesive provided over the surface and comprising a plurality of adhesive structures. The plurality of adhesive structures comprises a first adhesive structure protruding from the surface; and a second adhesive structure protruding from the surface. The first adhesive structure and the second adhesive structure have an anisotropic flexibility parallel to the surface. The directions of minimal flexibility of the first adhesive structure and the second adhesive structure are different.
(FR) La présente invention concerne un dispositif de retenue pour retenir un substrat. Le dispositif de retenue comprend une surface configurée pour faire face au substrat, et un adhésif disposé sur la surface et comprenant une pluralité de structures adhésives. La pluralité de structures adhésives comprend une première structure adhésive faisant saillie à partir de la surface ; et une seconde structure adhésive faisant saillie à partir de la surface. La première structure adhésive et la seconde structure adhésive ont une flexibilité anisotrope parallèle à la surface. Les directions de flexibilité minimale de la première structure adhésive et de la seconde structure adhésive sont différentes.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)