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1. (WO2019042484) METHOD OF MANUFACTURING A POROUS DIAMOND LAYER AND A NANOFIBER SUPPORTED THICK POROUS DIAMOND LAYER
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Pub. No.: WO/2019/042484 International Application No.: PCT/CZ2017/050053
Publication Date: 07.03.2019 International Filing Date: 01.11.2017
IPC:
C23C 16/27 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
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characterised by the deposition of inorganic material, other than metallic material
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Deposition of carbon only
27
Diamond only
Applicants:
FYZIKALNI USTAV AV CR, V.V.I. [CZ/CZ]; Na Slovance 1999/2 18221 Praha 8, CZ
USTAV FYZIKALNI CHEMIE J. HEYROVSKEHO AV CR, V. V. I. [CZ/CZ]; Dolejskova 2155/3 182 00 Praha 8 - Liben, CZ
Inventors:
MORTET, Vincent; CZ
TAYLOR, Andrew; CZ
KAVAN, Ladislav; CZ
FRANK, Otakar; CZ
VLCKOVA, Zuzana; CZ
KRYSOVA, Hana; CZ
PETRAK, Vaclav; CZ
Priority Data:
PV 2017-50029.08.2017CZ
Title (EN) METHOD OF MANUFACTURING A POROUS DIAMOND LAYER AND A NANOFIBER SUPPORTED THICK POROUS DIAMOND LAYER
(FR) PROCÉDÉ DE PRODUCTION D'UNE COUCHE DE DIAMANT POREUX ET D'UNE COUCHE DE DIAMANT POREUX ÉPAISSE SOUTENUE PAR DES NANOFIBRES
Abstract:
(EN) The present invention discloses a method of manufacturing a porous diamond layer (6) and a nanofiber supported porous diamond body (7). The method comprising step of seeding of diamond nanoparticles into a nanofibers of any material susceptible withstand of plasma-enhanced deposition conditions. Seeded nanofibers are then mixed in a sacrificial material. This mixture is then applied on a substrate (2) and dried to form a solid nanofibers/sacrificial material composite film. Resulting composite film is then subjected to plasma enhanced chemical vapour deposition of the diamond under conditions where the sacrificial material is decomposed. These steps can be repeated for forming a nanofibers supported porous diamond layer (6) of a desired thickness. The diamond can be doped by boron. Such a conductive porous boron doped diamond layers (1, 6) serve for microelectronical (MEMS) applications where chemical stability is required. In particularly, porous conductive boron-doped diamond films can be employed as a sensors, supercapacitor and/or a filter to separate organic electrochemical substances.
(FR) La présente invention concerne un procédé de production d'une couche de diamant poreux (6) et d'un corps de diamant poreux soutenu par des nanofibres (7). Le procédé comprend une étape d'ensemencement de nanoparticules de diamant en nanofibres de n'importe quel matériau susceptible de résister à des conditions de dépôt améliorées par plasma. Les nanofibres ensemencées sont ensuite mélangées dans un matériau sacrificiel. Le mélange est ensuite appliqué sur un substrat (2) et séché en vue de former un film composite de nanofibres solides/matériau sacrificiel. Le film composite ainsi obtenu est ensuite soumis à un dépôt chimique en phase vapeur amélioré par plasma du diamant, dans des conditions où le matériau sacrificiel est décomposé. Les étapes peuvent être répétées pour former une couche de diamant poreux soutenue par des nanofibres (6) d'une épaisseur souhaitée. Le diamant peut être dopé par du bore. De telles couches de diamant dopées au bore poreux conducteur (1, 6) servent à des applications de micro-électronique (MEMS), où une stabilité chimique est requise. En particulier, des films de diamant dopés au bore conducteur poreux peuvent être utilisés en tant que capteurs, supercondensateurs et/ou filtres en vue de séparer des substances électrochimiques organiques.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)