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1. (WO2019039329) OPTICAL INSPECTION APPARATUS AND ABNORMALITY DETECTION METHOD
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/039329 International Application No.: PCT/JP2018/030122
Publication Date: 28.02.2019 International Filing Date: 10.08.2018
IPC:
G01N 21/88 (2006.01) ,G01N 21/64 (2006.01) ,G01N 21/85 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
62
Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63
optically excited
64
Fluorescence; Phosphorescence
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
85
Investigating moving fluids or granular solids
Applicants:
株式会社イシダ ISHIDA CO., LTD. [JP/JP]; 京都府京都市左京区聖護院山王町44番地 44 Sanno-cho, Shogoin, Sakyo-ku, Kyoto-shi, Kyoto 6068392, JP
Inventors:
中島 雅喜 NAKAJIMA Masayoshi; JP
谷口 友厚 TANIGUCHI Tomoatsu; JP
樽本 祥憲 TARUMOTO Yoshinori; JP
近藤 雅 KONDO Tadashi; JP
杉本 一幸 SUGIMOTO Kazuyuki; JP
Agent:
長谷川 芳樹 HASEGAWA Yoshiki; JP
黒木 義樹 KUROKI Yoshiki; JP
柴山 健一 SHIBAYAMA Kenichi; JP
Priority Data:
2017-15944222.08.2017JP
2017-15944522.08.2017JP
2017-15972922.08.2017JP
2017-15973022.08.2017JP
Title (EN) OPTICAL INSPECTION APPARATUS AND ABNORMALITY DETECTION METHOD
(FR) APPAREIL D'INSPECTION OPTIQUE ET PROCÉDÉ DE DÉTECTION D'ANOMALIE
(JA) 光検査装置、及び異常検出方法
Abstract:
(EN) This optical inspection apparatus is provided with: an excitation light irradiation unit that irradiates an inspection region with excitation light that causes a foreign substance attached to an object to be inspected to emit fluorescence; a light conversion unit which is installed in the inspection region and in which fluorescence is induced by the excitation light; a fluorescence detection unit that detects the fluorescence emitted from the light conversion unit and the fluorescence emitted from the foreign substance in the inspection region and outputs detection signals of the detected fluorescence; and a processing unit that detects the presence or absence of an abnormality in the excitation light irradiation unit and/or the fluorescence detection unit on the basis of the detection signal of the fluorescence emitted from the light conversion unit.
(FR) La présente invention concerne un appareil d'inspection optique qui est pourvu : d'une unité d'irradiation de lumière d'excitation qui irradie une région d'inspection avec une lumière d'excitation qui entraîne l'émission de fluorescence par une substance étrangère fixée à un objet à inspecter ; une unité de conversion de lumière qui est installée dans la région d'inspection et dans laquelle la fluorescence est induite par la lumière d'excitation ; une unité de détection de fluorescence qui détecte la fluorescence émise par l'unité de conversion de lumière et la fluorescence émise par la substance étrangère dans la région d'inspection et délivre des signaux de détection de la fluorescence détectée ; et une unité de traitement qui détecte la présence ou l'absence d'une anomalie dans l'unité d'irradiation de lumière d'excitation et/ou l'unité de détection de fluorescence sur la base du signal de détection de la fluorescence émise par l'unité de conversion de lumière.
(JA) 光検査装置は、被検査物に付着した異物に蛍光を発生させるための励起光を検査領域に照射する励起光照射部と、検査領域内に設置され、励起光によって蛍光を発生させる光変換部と、検査領域において異物が発生させた蛍光と光変換部が発生させた蛍光とを検出し、検出した蛍光の検出信号を出力する蛍光検出部と、光変換部が発生させた蛍光の検出信号に基づいて、励起光照射部及び蛍光検出部の少なくともいずれかの異常の有無を検出する処理部と、を備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)