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1. (WO2019033540) EVAPORATION CRUCIBLE AND EVAPORATION SYSTEM
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/033540 International Application No.: PCT/CN2017/106818
Publication Date: 21.02.2019 International Filing Date: 19.10.2017
IPC:
C23C 14/24 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
Applicants:
武汉华星光电半导体显示技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. [CN/CN]; 中国湖北省武汉市 东湖新技术开发区高新大道666号光谷生物创新园C5栋305室 305 Room, Building C5 Biolake of Optics Valley, No. 666 Gaoxin Avenue, Wuhan East Lake High-tech Development Zone Wuhan, Hubei 430079, CN
Inventors:
徐超 XU, Chao; CN
Agent:
深圳翼盛智成知识产权事务所(普通合伙) ESSEN PATENT&TRADEMARK AGENCY; 中国广东省深圳市 福田区深南大道6021号喜年中心A座1709-1711 Hailrun Complex Block A Room 1709-1711 No. 6021 Shennan Blvd, Futian District ShenZhen, Guangdong 518040, CN
Priority Data:
201710692335.814.08.2017CN
Title (EN) EVAPORATION CRUCIBLE AND EVAPORATION SYSTEM
(FR) CREUSET D’ÉVAPORATION ET SYSTÈME D’ÉVAPORATION
(ZH) 蒸镀坩埚及蒸镀系统
Abstract:
(EN) An evaporation crucible (2), comprising a crucible body (21) and at least two heating devices (22) wound around the crucible body (21). The crucible body (21) comprises at least two cylindrical structures, each cylindrical structure having a different diameter, and the crucible body (21) is used for holding an evaporation material. Each of the cylindrical structures is correspondingly provided with a heating device (22, 221, 222, 223), and the heating device (22, 221, 222, 223) is used for heating the evaporation material in the corresponding cylindrical structure. The heating devices (22, 221, 222, 223) further comprise a temperature measuring and controlling portion for respectively measuring and controlling heating temperatures of at least two heating regions (211, 212, 213). An evaporation system is further disclosed.
(FR) La présente invention concerne un creuset d’évaporation (2), comprenant un corps de creuset (21) et au moins deux dispositifs de chauffage (22) enroulés autour du corps de creuset (21). Le corps de creuset (21) comprend au moins deux structures cylindriques, chaque structure cylindrique ayant un diamètre différent, et le corps de creuset (21) étant utilisé pour contenir un matériau d’évaporation. Chacune des structures cylindriques est pourvue en correspondance d’un dispositif de chauffage (22, 221, 222, 223), et le dispositif de chauffage (22, 221, 222, 223) est utilisé pour chauffer le matériau d’évaporation dans la structure cylindrique correspondante. Les dispositifs de chauffage (22, 221, 222, 223) comprennent en outre une partie de mesure et de régulation de température pour mesurer et réguler respectivement des températures de chauffage d’au moins deux régions de chauffage (211, 212, 213). L’invention concerne en outre un système d’évaporation.
(ZH) 一种蒸镀坩埚(2),包括坩埚本体(21)和缠绕在坩埚本体(21)四周的至少两个加热装置(22);坩埚本体(21)包括至少两个筒状结构,每个筒状结构具有不同的直径,坩埚本体(21)用于盛放蒸镀材料;每个筒状结构对应设置一个加热装置(22,221,222,223),加热装置(22,221,222,223)对对应筒状结构中的蒸镀材料进行加热;加热装置(22,221,222,223)还包括温度测控部分,用以分别测控至少两个加热区域(211,212,213)的加热温度。还公开了一种蒸镀坩埚和一种蒸镀系统。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)
Also published as:
US20190048460