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1. (WO2019033507) SUBSTRATE TRANSFER EQUIPMENT
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/033507 International Application No.: PCT/CN2017/102645
Publication Date: 21.02.2019 International Filing Date: 21.09.2017
IPC:
B65G 49/00 (2006.01) ,H01L 21/677 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
Applicants:
武汉华星光电半导体显示技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. [CN/CN]; 中国湖北省武汉市 东湖新技术开发区高新大道666号光谷生物创新园C5栋305室 305 Room, Building C5, Biolake of Optics Valley No. 666 Gaoxin Avenue, Wuhan East Lake High-Tech Development Zone Wuhan, Hubei 430070, CN
Inventors:
陈建锋 CHEN, Jianfeng; CN
Agent:
深圳市威世博知识产权代理事务所(普通合伙) CHINA WISPRO INTELLECTUAL PROPERTY LLP.; 中国广东省深圳市 南山区高新区粤兴三道8号中国地质大学产学研基地中地大楼A806 Room A806, Zhongdi Building China University of Geosciences Base No. 8 Yuexing 3rd Road, High-Tech Industrial Estate, Nanshan District Shenzhen, Guangdong 518057, CN
Priority Data:
201710720898.318.08.2017CN
Title (EN) SUBSTRATE TRANSFER EQUIPMENT
(FR) ÉQUIPEMENT DE TRANSFERT DE SUBSTRAT
(ZH) 一种基板传送设备
Abstract:
(EN) A substrate transfer equipment, the transfer device comprising a cabin (11), a transfer device (12), and an exhaust device (13); the cabin (11) is provided with an air inlet (114); the transfer device (12) comprises a transmission mechanism (121), and the transmission mechanism (121) is disposed inside of the cabin (11); the exhaust device (13) is used for suctioning air inside of the cabin (11) and then discharging the same; when the exhaust device (13) is in operation, the air pressure inside of the cabin (11) is lower than the air pressure outside of the cabin (11) such that dust matter generated during the operation of the transmission mechanism (121) of the transfer device (12) is removed by a strong force, and such that the air outside of the cabin (11) enters the inside of the cabin (11) from the air inlet (114) of the cabin (11). By means of such equipment, dust matter generated by the transmission mechanism (121) may be prevented from attaching to a substrate transferred by the transfer device (12), thereby improving the quality of the substrate.
(FR) L'invention concerne un équipement de transfert de substrat, le dispositif de transfert comprenant une cabine (11), un dispositif de transfert (12) et un dispositif d'échappement (13) ; la cabine (11) est pourvue d'une entrée d'air (114) ; le dispositif de transfert (12) comprend un mécanisme de transmission (121) et le mécanisme de transmission (121) est disposé à l'intérieur de la cabine (11) ; le dispositif d'échappement (13) est utilisé pour aspirer l'air à l'intérieur de la cabine (11) puis décharger celui-ci ; lorsque le dispositif d'échappement (13) est en fonctionnement, la pression d'air à l'intérieur de la cabine (11) est inférieure à la pression d'air à l'extérieur de la cabine (11) de telle sorte que la poussière générée pendant le fonctionnement du mécanisme de transmission (121) du dispositif de transfert (12) soit retirée par une force élevée et de telle sorte que l'air à l'extérieur de la cabine (11) entre à l'intérieur de la cabine (11) depuis l'entrée d'air (114) de la cabine (11). Au moyen de cet équipement, il est possible d'empêcher la poussière générée par le mécanisme de transmission (121) de se fixer à un substrat transféré par le dispositif de transfert (12), ce qui permet d'améliorer la qualité du substrat.
(ZH) 一种基板传送设备,该传送设备包括舱体(11)、传送装置(12)及排气装置(13);舱体(11)设有进气口(114);传送装置(12)包括传动机构(121),传动机构(121)设置于舱体(11)内部;排气装置(13),排气装置(13)用于吸取舱体(11)内部的空气并排放;其中,在排气装置(13)工作时,舱体(11)内部的气压小于舱体(11)外部的气压,以强力带走传送装置(12)的传动机构(121)工作时产生的尘埃物质,并使得舱体(11)外部的空气从舱体(11)的进气口(114)进入舱体(11)内部。通过这种设备,能够使得传动机构(121)产生的尘埃物质不会吸附于传送装置(12)传送的基板上,提高了基板的品质。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)