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1. (WO2019032252) ULTRA-HIGH VACUUM TRANSPORT AND STORAGE
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Pub. No.: WO/2019/032252 International Application No.: PCT/US2018/042635
Publication Date: 14.02.2019 International Filing Date: 18.07.2018
IPC:
H01L 21/677 (2006.01) ,H01L 21/67 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
Applicants:
LAM RESEARCH CORPORATION [US/US]; 4650 Cushing Parkway, M/S CA-1 Fremont, California 94538, US
Inventors:
PANAGOPOULOS, Theodoros; US
GOULD, Richard; US
REYES, Edmundo; US
BONIFACE, John; US
BERRY, Ivan; US
DULKIN, Alexander; US
VAN SCHRAVENDIJK, Bart; US
Agent:
LEE, Michael; US
Priority Data:
15/674,88311.08.2017US
Title (EN) ULTRA-HIGH VACUUM TRANSPORT AND STORAGE
(FR) TRANSPORT ET STOCKAGE SOUS ULTRAVIDE
Abstract:
(EN) An apparatus for transporting or storing at least one semiconductor wafer in an ultra-high vacuum is provided. A portable vacuum transfer pod is provided comprising an internal wafer storage chamber for storing one or more wafers and a wafer support for supporting at least one wafer within the internal wafer storage chamber. A passively capable vacuum pump capable of passive vacuum pumping is in fluid connection with the internal wafer storage chamber and is mechanically connected to the portable vacuum transfer pod. A shut off valve for opening and closing the fluid connection is between the passively capable vacuum pump and the internal wafer storage chamber.
(FR) L'invention concerne un appareil de transport ou de stockage d'au moins une tranche de semi-conducteur sous ultravide. Une capsule de transfert sous vide transportable comprend une chambre interne de stockage de tranches permettant de stocker une ou plusieurs tranches et un support de tranches destiné à supporter au moins une tranche à l'intérieur de la chambre interne de stockage de tranches. Une pompe à vide à capacité passive permettant un pompage passif de vide est en communication fluidique avec la chambre interne de stockage de tranches et est reliée mécaniquement à la capsule de transfert sous vide transportable. Une vanne d'isolement permettant d'ouvrir et de fermer la connexion fluidique est située entre la pompe à vide à capacité passive et la chambre interne de stockage de tranches.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)