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1. (WO2019031788) SURFACE-TREATED POLISHING PAD WINDOW AND POLISHING PAD COMPRISING SAME
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/031788 International Application No.: PCT/KR2018/008895
Publication Date: 14.02.2019 International Filing Date: 06.08.2018
IPC:
B24B 37/20 (2012.01) ,B24B 37/013 (2012.01)
B PERFORMING OPERATIONS; TRANSPORTING
24
GRINDING; POLISHING
B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37
Lapping machines or devices; Accessories
11
Lapping tools
20
Lapping pads for working plane surfaces
B PERFORMING OPERATIONS; TRANSPORTING
24
GRINDING; POLISHING
B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37
Lapping machines or devices; Accessories
005
Control means for lapping machines or devices
013
Devices or means for detecting lapping completion
Applicants:
에스케이씨 주식회사 SKC CO., LTD. [KR/KR]; 경기도 수원시 장안구 장안로 309번길 84 84, Jangan-ro 309beon-gil, Jangan-gu, Suwon-si, Gyeonggi-do 16336, KR
Inventors:
윤성훈 YUN, Sunghoon; KR
서장원 SEO, Jang Won; KR
안재인 AHN, Jaein; KR
윤종욱 YUN, Jong Wook; KR
허혜영 HEO, Hye Young; KR
Agent:
제일특허법인(유) FIRSTLAW P.C.; 서울시 서초구 마방로 60 60 Mabang-Ro, Seocho-Ku, Seoul 06775, KR
Priority Data:
10-2017-009955907.08.2017KR
Title (EN) SURFACE-TREATED POLISHING PAD WINDOW AND POLISHING PAD COMPRISING SAME
(FR) FENÊTRE DE TAMPON DE POLISSAGE TRAITÉE EN SURFACE ET TAMPON DE POLISSAGE LA COMPRENANT
(KO) 표면 처리된 연마패드용 윈도우 및 이를 포함하는 연마패드
Abstract:
(EN) An embodiment relates to a polishing pad window which is surface-treated and thus can prevent an endpoint detection error that may be caused by wear of the window during a CMP process, and a polishing pad comprising the same.
(FR) Un mode de réalisation de l'invention concerne une fenêtre de tampon de polissage qui est traitée en surface et peut ainsi empêcher une erreur de détection de point d'extrémité qui peut être provoquée par l'usure de la fenêtre pendant un processus de CMP, ainsi qu'un tampon de polissage la comprenant.
(KO) 실시예는 표면 처리되어 CMP 공정 중 윈도우의 마모로 인해 발생할 수 있는 종점검출의 오류를 방지할 수 있는 연마패드용 윈도우 및 이를 포함하는 연마패드에 관한 것이다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)