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1. (WO2019031667) DEVICE AND METHOD FOR MEASURING THICKNESS AND REFRACTIVE INDEX OF MULTILAYER THIN FILM BY USING ANGLE-RESOLVED SPECTRAL REFLECTOMETRY
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/031667 International Application No.: PCT/KR2018/001183
Publication Date: 14.02.2019 International Filing Date: 26.01.2018
IPC:
G01B 9/02 (2006.01) ,G01B 11/06 (2006.01) ,G01J 3/02 (2006.01) ,G06T 7/60 (2006.01) ,G02B 27/14 (2006.01) ,G02B 27/28 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
02
for measuring length, width, or thickness
06
for measuring thickness
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02
Details
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7
Image analysis, e.g. from bit-mapped to non bit-mapped
60
Analysis of geometric attributes, e.g. area, centre of gravity, perimeter, from an image
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
10
Beam splitting or combining systems
14
operating by reflection only
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
28
for polarising
Applicants:
한국표준과학연구원 KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE [KR/KR]; 대전시 유성구 가정로 267 267, Gajeong-ro Yuseong-gu Daejeon 34113, KR
Inventors:
김영식 GHIM, Young-sik; KR
이혁교 RHEE, Hyug-gyo; KR
Agent:
특허법인 아이퍼스 IPUS PATENT & LAW FIRM; 서울시 강남구 논현로85길 58 6층 6th Floor 58, Nonhyeon-ro 85-gil Gangnam-gu Seoul 06234, KR
Priority Data:
10-2017-009978707.08.2017KR
Title (EN) DEVICE AND METHOD FOR MEASURING THICKNESS AND REFRACTIVE INDEX OF MULTILAYER THIN FILM BY USING ANGLE-RESOLVED SPECTRAL REFLECTOMETRY
(FR) DISPOSITIF ET PROCÉDÉ DE MESURE DE L'ÉPAISSEUR ET DE L'INDICE DE RÉFRACTION D'UN FILM MINCE MULTICOUCHE PAR RÉFLECTOMÉTRIE SPECTRALE À RÉSOLUTION ANGULAIRE
(KO) 각도분해 분광 반사광측정법을 이용한 다층박막 두께 및 굴절률 측정장치 및 측정방법
Abstract:
(EN) The present invention relates to a device and method for measuring a thickness and a refractive index of a multilayer thin film by measuring angle-resolved spectral reflectance according to polarization of light. According to one embodiment of the present invention, the purpose of the present invention is to provide a device and method for measuring a thickness and a refractive index of a multilayer film structure by using angle-resolved spectral reflectometry, capable of measuring and analyzing the thickness and refractive index of each layer of the structure having a multilayer thin film through an s-polarized image and a p-polarized image of reflected light positioned in a back focal plane of an objective lens by means of an angle-resolved spectral image acquiring unit.
(FR) La présente invention concerne un dispositif et un procédé de mesure d'une épaisseur et d'un indice de réfraction d'un film mince multicouche par mesure de la réflectance spectrale à résolution angulaire en fonction de la polarisation de la lumière. Selon un mode de réalisation de la présente invention, le but de la présente invention est de fournir un dispositif et un procédé pour mesurer une épaisseur et un indice de réfraction d'une structure de film multicouche à l'aide d'une réflectométrie spectrale à résolution angulaire, capable de mesurer et d'analyser l'épaisseur et l'indice de réfraction de chaque couche de la structure ayant un film mince multicouche à travers une image polarisée s et une image polarisée p de lumière réfléchie positionnée dans un plan focal arrière d'une lentille d'objectif au moyen d'une unité d'acquisition d'image spectrale à résolution angulaire.
(KO) 본 발명은 빛의 편광에 따른 각도분해 분광 반사율을 측정하여 다층 박막의 두께 및 굴절률 측정장치 및 측정방법에 대한 것이다. 본 발명의 일실시예에 따르면, 각도분해 분광영상획득부를 통해 대물렌즈의 후초점면(back focal plane)에 위치한 반사광의 s-편광영상과 p-편광영상을 통해 다층 박막을 갖는 구조물의 각층의 두께 및 굴절률을 측정, 분석할 수 있는 각도분해 분광 반사광측정법을 이용한 다층막 구조물 두께 및 굴절률 측정장치 및 측정방법을 제공하는 데 그 목적이 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)