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1. (WO2019031565) METHOD FOR MANUFACTURING MEMS VIBRATION ELEMENT, AND MEMS VIBRATION ELEMENT
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/031565 International Application No.: PCT/JP2018/029842
Publication Date: 14.02.2019 International Filing Date: 08.08.2018
IPC:
B81C 1/00 (2006.01) ,B81B 3/00 (2006.01) ,H01G 5/013 (2006.01) ,H01G 7/02 (2006.01) ,H02N 2/18 (2006.01) ,H02N 11/00 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
1
Manufacture or treatment of devices or systems in or on a substrate
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
G
CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
5
Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
01
Details
013
Dielectrics
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
G
CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
7
Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
02
Electrets, i.e. having a permanently-polarised dielectric
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
N
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2
Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
18
producing electrical output from mechanical input, e.g. generators
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
N
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
11
Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
Applicants:
国立大学法人 静岡大学 NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY [JP/JP]; 静岡県静岡市駿河区大谷836 836, Ohya, Suruga-ku, Shizuoka-shi, Shizuoka 4228529, JP
株式会社鷺宮製作所 SAGINOMIYA SEISAKUSHO, INC. [JP/JP]; 東京都中野区若宮2丁目55番5号 55-5, Wakamiya 2-chome, Nakano-ku, Tokyo 1650033, JP
Inventors:
橋口 原 HASHIGUCHI, Gen; JP
古賀 英明 KOGA, Hideaki; JP
Agent:
永井 冬紀 NAGAI, Fuyuki; JP
池田 恵一 IKEDA, Keiichi; JP
Priority Data:
2017-15447409.08.2017JP
Title (EN) METHOD FOR MANUFACTURING MEMS VIBRATION ELEMENT, AND MEMS VIBRATION ELEMENT
(FR) PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT DE VIBRATION MEMS, ET ÉLÉMENT DE VIBRATION MEMS
(JA) MEMS振動素子の製造方法およびMEMS振動素子
Abstract:
(EN) Provided is a method for manufacturing a MEMS vibration element having a fixed electrode, a movable electrode, and an elastic support portion that elastically supports the movable electrode with respect to the fixed electrode, the method comprising: a step for forming the fixed electrode and the movable electrode by etching a base with a first thickness; and a step for forming the elastic support portion with a second thickness that is thinner than the first thickness, by etching the base.
(FR) L'invention concerne un procédé de fabrication d'un élément de vibration MEMS comprenant une électrode fixe, une électrode mobile, et une partie support élastique qui soutient élastiquement l'électrode mobile par rapport à l'électrode fixe, le procédé comprenant : une étape de formation des électrodes fixe et mobile par gravure d'une base à une première épaisseur ; et une étape de formation de la partie support élastique à une seconde épaisseur qui est plus fine que la première épaisseur, par gravure de la base.
(JA) 固定電極と、可動電極と、可動電極を固定電極に対して弾性支持する弾性支持部とを有するMEMS振動素子の製造方法は、第1の厚さの基材をエッチング加工して、固定電極および前記可動電極を形成することと、基材をエッチング加工して、弾性支持部を第1の厚さよりも薄い第2の厚さに形成することとを含む。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)