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1. (WO2019031142) SUBSTRATE STORAGE CONTAINER AND METHOD FOR PRODUCING SAME
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/031142 International Application No.: PCT/JP2018/026060
Publication Date: 14.02.2019 International Filing Date: 10.07.2018
IPC:
H01L 21/673 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
Applicants:
信越ポリマー株式会社 SHIN-ETSU POLYMER CO.,LTD. [JP/JP]; 東京都千代田区神田須田町一丁目9番地 9, Kandasuda-cho 1chome, Chiyoda-ku Tokyo 1010041, JP
Inventors:
戸田 順也 TODA Junya; JP
三村 博 MIMURA Hiroshi; JP
渡辺 直人 WATANABE Naoto; JP
Agent:
坂本 智弘 SAKAMOTO Tomohiro; JP
Priority Data:
2017-15484710.08.2017JP
Title (EN) SUBSTRATE STORAGE CONTAINER AND METHOD FOR PRODUCING SAME
(FR) RÉCIPIENT DE STOCKAGE DE SUBSTRAT ET SON PROCÉDÉ DE PRODUCTION
(JA) 基板収納容器及びその製造方法
Abstract:
(EN) Provided are: a substrate storage container with which it is possible to suppress deformation of a functional member that is formed by insert molding; and a method for producing the substrate storage container. A device positioning member (4) comprises: a mounting part (41) which has a thick-wall part formed in such a manner as to have the same wall thickness as a bottom plate (18) of a container body (10) and a thin-wall part (410) having a wall thickness that becomes thinner toward the outer edge from the thick-wall part; and a main body part (42) that is coupled to the mounting part (41), wherein the mounting part (41) is disposed at an insertion position in the container body (10) such that one face (420) of the mounting part (41) is flush with the interior surface (19) of the container body (10).
(FR) L'invention concerne : un récipient de stockage de substrat avec lequel il est possible de supprimer la déformation d'un élément fonctionnel qui est formé par moulage par insertion; et un procédé de production du récipient de stockage de substrat. Un élément de positionnement de dispositif (4) comprend : une partie de montage (41) qui a une partie de paroi épaisse formée de manière à avoir la même épaisseur de paroi qu'une plaque inférieure (18) d'un corps de récipient (10) et une partie de paroi mince (410) ayant une épaisseur de paroi qui devient plus mince vers le bord extérieur à partir de la partie de paroi épaisse; et une partie de corps principal (42) qui est couplée à la partie de montage (41), la partie de montage (41) étant disposée dans une position d'insertion dans le corps de récipient (10) de telle sorte qu'une face (420) de la partie de montage (41) affleure la surface intérieure (19) du corps de récipient (10).
(JA) インサート成形される機能部材の変形を抑制できる基板収納容器及びその製造方法を提供する。装置位置決め部材(4)は、容器本体(10)の底板(18)の肉厚と等しい肉厚で形成される厚肉部、及び厚肉部から外縁に向かうに従って肉厚が薄くなる薄肉部(410)を有する取付部(41)と、取付部(41)に連結される本体部(42)と、を含み、取付部(41)の一面(420)が、容器本体(10)の内面(19)と面一となるように、容器本体(10)のインサート位置に配置されている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)