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1. (WO2019031126) METHOD FOR PRODUCING PIEZOELECTRIC SINGLE CRYSTAL INGOT AND PIEZOELECTRIC SINGLE CRYSTAL INGOT
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/031126 International Application No.: PCT/JP2018/025627
Publication Date: 14.02.2019 International Filing Date: 06.07.2018
IPC:
C30B 29/22 (2006.01) ,C30B 11/00 (2006.01) ,H01L 41/187 (2006.01) ,H01L 41/41 (2013.01)
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
29
Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
10
Inorganic compounds or compositions
16
Oxides
22
Complex oxides
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
11
Single-crystal-growth by normal freezing or freezing under temperature gradient, e.g. Bridgman- Stockbarger method
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
16
Selection of materials
18
for piezo-electric or electrostrictive elements
187
Ceramic compositions
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22
Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
35
Forming piezo-electric or electrostrictive materials
39
Inorganic materials
41
by melting
Applicants:
JFEミネラル株式会社 JFE MINERAL COMPANY, LTD. [JP/JP]; 東京都港区芝三丁目8番2号 8-2, Shiba 3-chome, Minato-ku, Tokyo 1050014, JP
Inventors:
中村 啓一郎 NAKAMURA Keiichiro; JP
越前谷 一彦 ECHIZENYA Kazuhiko; JP
Agent:
落合 憲一郎 OCHIAI Kenichiro; JP
Priority Data:
2017-15387809.08.2017JP
Title (EN) METHOD FOR PRODUCING PIEZOELECTRIC SINGLE CRYSTAL INGOT AND PIEZOELECTRIC SINGLE CRYSTAL INGOT
(FR) PROCÉDÉ DE PRODUCTION D'UN LINGOT MONOCRISTALLIN PIÉZOÉLECTRIQUE ET LINGOT MONOCRISTALLIN PIÉZOÉLECTRIQUE
(JA) 圧電単結晶インゴットの製造方法および圧電単結晶インゴット
Abstract:
(EN) Provided is a method for producing a piezoelectric single crystal ingot which shows small variation in the concentration of PbTiO3 in the growth direction of single crystal. A complete solid solution-type piezoelectric single crystal ingot is produced by using the Bridgman method, said method comprising: filling a starting material, wherein a relaxor having a compositional formula Pb(B1,B2)O3 is blended with lead titanate having a composition PbTiO3 in such a manner as to give a preset composition, into a crucible for growth; heating the material to the melting temperature thereof or higher to give a melted liquid layer; then moving the crucible for growth toward the low temperature side; and thus starting one-direction solidification from the lower part of the crucible to thereby produce a single crystal. In the course of the one-direction solidification, the starting material containing the relaxor having a maximum grain size of 3 mm or less and lead titanate is continuously supplied into the crucible for growth. Thus, a piezoelectric single crystal ingot, wherein the PbTiO3 concentration remains almost constant and the variation in the PbTiO3 concentration falls within a range of ±0.5 mol% over a length of 100 mm or longer in the direction of crystal growth, can be easily produced and, from the piezoelectric single crystal ingot, a piezoelectric element having excellent piezoelectric characteristics can be manufactured at a high yield.
(FR) L'invention concerne un procédé de production d'un lingot monocristallin piézoélectrique qui présente une faible variation de la concentration de PbTiO3 dans la direction de croissance d'un monocristal. Un lingot monocristallin piézoélectrique complet de type solution solide est produit en utilisant la méthode de Bridgman, ladite méthode comprenant : le remplissage d'une matière première, un relaxeur qui a une formule compositionnelle Pb(B1,B2)O3 étant mélangé avec du titanate de plomb ayant une composition PbTiO3 de manière à donner une composition prédéfinie, dans un creuset pour la croissance ; le chauffage du matériau à sa température de fusion ou plus pour donner une couche de liquide fondu ; puis le déplacement du creuset pour la croissance vers le côté basse température ; et ainsi le démarrage d'une solidification unidirectionnelle à partir de la partie inférieure du creuset pour ainsi produire un monocristal. Au cours de la solidification unidirectionnelle, la matière première contenant le relaxeur ayant une taille de grain maximale de 3 mm ou moins et du titanate de plomb est introduite en continu dans le creuset pour la croissance. Ainsi, un lingot monocristallin piézoélectrique, dans lequel la concentration de PbTiO3 reste presque constante et la variation de la concentration en PbTiO3 se situe dans une plage de ± 0,5 % en moles sur une longueur de 100 mm ou plus dans la direction de croissance cristalline, peut être facilement produit et, à partir du lingot monocristallin piézoélectrique, un élément piézoélectrique ayant d'excellentes caractéristiques piézoélectriques peut être fabriqué à un rendement élevé.
(JA) 単結晶成長方向にPbTiO3の濃度の変動の幅が狭い、圧電単結晶インゴットの製造方法を提供する。 所定の組成となるように、Pb(B1,B2)O3の組成式をもつリラクサーと、PbTiO3の組成をもつチタン酸鉛とを、配合した原料を、育成坩堝に充填し、融点以上に加熱して、融液層としたのちに、低温方向に育成坩堝を移動させて、坩堝の下部から一方向凝固を開始させ、単結晶を製造するブリッジマン法を用いて、全率固溶型圧電単結晶インゴットを製造する。一方向凝固させる途中に、育成坩堝中に、最大粒径が3mm以下のリラクサーおよびチタン酸鉛を含む原料を、連続的に供給する。これにより、PbTiO3の濃度がほぼ一定で、かつPbTiO3の濃度の変動幅が、結晶成長方向に100mm以上の長さに亘って±0.5mol%以下となり、優れた圧電特性を有する圧電素子を歩留り高く作製できる圧電単結晶インゴットを容易に製造できる。
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African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)