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1. (WO2019030863) SUBSTRATE STORAGE CONTAINER
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/030863 International Application No.: PCT/JP2017/028950
Publication Date: 14.02.2019 International Filing Date: 09.08.2017
Chapter 2 Demand Filed: 20.07.2018
IPC:
H01L 21/673 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
Applicants:
ミライアル株式会社 MIRAIAL CO., LTD. [JP/JP]; 東京都豊島区東池袋1丁目24番1号 24-1, Higashi-Ikebukuro 1-chome, Toshima-ku, Tokyo 1700013, JP
Inventors:
松鳥 千明 MATSUTORI Chiaki; JP
Agent:
正林 真之 SHOBAYASHI Masayuki; JP
林 一好 HAYASHI Kazuyoshi; JP
岩池 満 IWAIKE Mitsuru; JP
Priority Data:
Title (EN) SUBSTRATE STORAGE CONTAINER
(FR) RÉCIPIENT DE STOCKAGE DE SUBSTRAT
(JA) 基板収納容器
Abstract:
(EN) This substrate storage container is provided with a container body, a lid member, a lateral substrate support portion, a lid-member-side substrate support portion, and a back-side substrate support portion 6. The substrate storage container is further provided with a clearing portion 83 which, when the lid member is opened from a container body opening portion that was closed by the lid member, clears a substrate W being supported by the back-side substrate support portion 6 and the lid-member-side substrate support portion from at least one of the back-side substrate support portion 6 and the lid-member-side substrate support portion.
(FR) L'invention concerne un récipient de stockage de substrat comprenant un corps de récipient, un élément couvercle, une partie de support de substrat latéral, une partie de support de substrat côté élément couvercle et une partie de support de substrat côté arrière 6. Le récipient de stockage de substrat comprend en outre une partie de dégagement 83 qui, lorsque l'élément couvercle est ouvert à partir d'une partie d'ouverture de corps de récipient qui a été fermée par l'élément couvercle, libère un substrat W porté par la partie de support de substrat côté arrière 6 et la partie de support de substrat côté élément couvercle à partir de la partie de support de substrat côté arrière 6 et/ou la partie de support de substrat côté élément couvercle.
(JA) 容器本体と、蓋体と、側方基板支持部と、蓋体側基板支持部と、奥側基板支持部6とを備える基板収納容器は、蓋体によって容器本体開口部が閉塞された状態から、容器本体開口部から蓋体が開かれるときに、奥側基板支持部6及び蓋体側基板支持部によって支持されている状態の基板Wを、奥側基板支持部6と蓋体側基板支持部とのうちの少なくとも一方から取り払う取り払い部83と、を備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)