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1. (WO2019029552) ELECTROMAGNETIC ACTIVATED MIRROR ARRAY WITH FLUID DAMPING AND MICRO-FABRICATED RECESS FOR MAGNET ASSEMBLY
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/029552 International Application No.: PCT/CN2018/099313
Publication Date: 14.02.2019 International Filing Date: 08.08.2018
IPC:
G02B 26/08 (2006.01)
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08
for controlling the direction of light
Applicants:
HUAWEI TECHNOLOGIES CO., LTD. [CN/CN]; Huawei Administration Building Bantian, Longgang District Shenzhen, Guangdong 518129, CN
Inventors:
MAN, Francis; US
Priority Data:
16/057,19807.08.2018US
62/543,23009.08.2017US
Title (EN) ELECTROMAGNETIC ACTIVATED MIRROR ARRAY WITH FLUID DAMPING AND MICRO-FABRICATED RECESS FOR MAGNET ASSEMBLY
(FR) RÉSEAU DE MIROIRS ACTIVÉS ÉLECTROMAGNÉTIQUES AVEC AMORTISSEMENT DE FLUIDE ET ÉVIDEMENT MICROFABRIQUÉ POUR ENSEMBLE D'AIMANT
Abstract:
(EN) A MEMS package includes a cavity formed within a package body, a semiconductor device disposed within the cavity and including a microelectromechanical systems (MEMS) micro-mirror, a damping fluid disposed within the cavity and at least partially surrounding a portion of the MEMS micro-mirror, and a magnet assembly disposed within the cavity and at least partially surrounded by the damping fluid, the magnet assembly being magnetically coupled with the MEMS micro-mirror.
(FR) Selon la présente invention, un module MEMS comprend une cavité formée dans un corps de module, un dispositif à semi-conducteur disposé à l'intérieur de la cavité et comprenant un micromiroir à microsystème électromécanique (MEMS), un fluide d'amortissement disposé dans la cavité et entourant au moins partiellement une partie du micromiroir à MEMS, et un ensemble d'aimant disposé dans la cavité et entouré au moins partiellement par le fluide d'amortissement, l'ensemble d'aimant étant magnétiquement couplé au micromiroir à MEMS.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)