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1. (WO2019029112) METHOD OF UNIFORMLY CONTROLLING TEMPERATURE OF LARGE-AREA FLEXIBLE SUBSTRATE
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2019/029112 International Application No.: PCT/CN2017/119660
Publication Date: 14.02.2019 International Filing Date: 29.12.2017
IPC:
C23C 14/54 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
54
Controlling or regulating the coating process
Applicants:
米亚索乐装备集成(福建)有限公司 MIASOLE EQUIPMENT INTEGRATION (FUJIAN) CO., LTD. [CN/CN]; 中国福建省泉州市 鲤城区高新区紫山路42号 No. 42 Zishan Road, Hi-Tech Zone, Licheng District Quanzhou, Fujian 362000, CN
Inventors:
田晶 TIAN, Jing; CN
胡超 HU, Chao; CN
孙红霞 SUN, Hongxia; CN
李雪松 LI, Xuesong; CN
江湖 JIANG, Hu; CN
王溢欢 WANG, Yihuan; CN
易珊 YI, Shan; CN
胡鹏臣 HU, Pengchen; CN
Agent:
北京维澳专利代理有限公司 PACIFIC CHINA PATENT AGENT CO., LTD.; 中国北京市 建国门外大街22号赛特大厦17层1701室 Room 1701, 17th Floor Scitech Tower 22 Jian Guo Men Wai Avenue Beijing 100004, CN
Priority Data:
201710676708.209.08.2017CN
Title (EN) METHOD OF UNIFORMLY CONTROLLING TEMPERATURE OF LARGE-AREA FLEXIBLE SUBSTRATE
(FR) PROCÉDÉ DE RÉGULATION UNIFORME DE LA TEMPÉRATURE D'UN SUBSTRAT FLEXIBLE DE GRANDE SURFACE
(ZH) 用于均匀控制大面积柔性衬底温度的方法
Abstract:
(EN) A method of uniformly controlling the temperature of a large-area flexible substrate (3), comprising the following steps: forming a heat absorbing layer (4) on a heat absorbing surface (2) of a flexible substrate (3), and controlling the radiation coefficient of the heat absorbing layer (4) to a set range; performing sampling measurement for the radiation coefficient of the heat absorbing layer (4) at a heating unit (1); and controlling the temperature of the heating unit (1) at a sampling position according to the radiation coefficient obtained from the sampling measurement.
(FR) Cette invention concerne un procédé de régulation uniforme de la température d'un substrat flexible de grande surface (3), comprenant les étapes suivantes consistant à : former une couche d'absorption de chaleur (4) sur une surface d'absorption de chaleur (2) d'un substrat flexible (3), et réguler le coefficient de rayonnement de la couche d'absorption de chaleur (4) dans une plage définie ; effectuer une mesure d'échantillonnage pour le coefficient de rayonnement de la couche d'absorption de chaleur (4) sur une unité de chauffage (1) ; et réguler la température de l'unité de chauffage (1) à une position d'échantillonnage en fonction du coefficient de rayonnement obtenu à partir de la mesure d'échantillonnage.
(ZH) 一种用于均匀控制大面积柔性衬底(3)温度的方法,包括如下步骤:在柔性衬底(3)的受热面(2)上形成热接收层(4),并将热接收层(4)的辐射系数控制在设定的范围内;采样测量热接收层(4)在加热单元(1)处的辐射系数;根据采样测量获得的辐射系数对采样位置处的加热单元(1)的温度进行控制。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)