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1. (WO2019028416) THERMALLY STABLE, DRIFT RESISTANT PROBE FOR A SCANNING PROBE MICROSCOPE AND METHOD OF MANUFACTURE
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Pub. No.: WO/2019/028416 International Application No.: PCT/US2018/045254
Publication Date: 07.02.2019 International Filing Date: 03.08.2018
IPC:
G01Q 60/38 (2010.01) ,B82Y 35/00 (2011.01)
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
60
Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof
24
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
38
Probes, their manufacture or their related instrumentation, e.g. holders
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
35
Methods or apparatus for measurement or analysis of nano-structures
Applicants:
BRUKER NANO, INC. [US/US]; 112 Robin Hill Road Santa Barbara, CA 93117, US
Inventors:
WONG, Jeffrey K.; US
MUKHOPADHYAY, Deepkishore; US
Agent:
DURST, Jay G.; Boyle Fredrickson, S.C. 840 N. Plankinton Ave Milwaukee, WI 53203, US
Priority Data:
62/540,95903.08.2017US
62/541,61704.08.2017US
Title (EN) THERMALLY STABLE, DRIFT RESISTANT PROBE FOR A SCANNING PROBE MICROSCOPE AND METHOD OF MANUFACTURE
(FR) SONDE THERMIQUEMENT STABLE RÉSISTANTE À LA DÉRIVE POUR MICROSCOPE À SONDE À BALAYAGE ET PROCÉDÉ DE FABRICATION
Abstract:
(EN) A probe assembly for a surface analysis instrument such as an atomic force microscope (AFM) that accommodates potential thermal drift effects includes a substrate defining a base of the probe assembly, a cantilever extending from the base and having a distal end, and a reflective pad disposed at or near the distal end. The reflective pad has a lateral dimension (e.g., length) between about twenty-five (25) microns, and can be less than a micron. Ideally, the reflective pad is patterned on the cantilever using photolithography. A corresponding method of manufacture of the thermally stable, drift resistant probe is also provided.
(FR) L'invention concerne un ensemble sonde d'un instrument d'analyse de surface tel qu'un microscope à force atomique (AFM) qui reçoit des effets de dérive thermique potentiels comprenant un substrat délimitant une base de l'ensemble sonde, un bras en porte-à-faux s'étendant à partir de la base et présentant une extrémité distale, et un tampon réfléchissant disposé au niveau ou à proximité de l'extrémité distale. Le tampon réfléchissant présente une dimension latérale (par exemple, une longueur) comprise entre environ vingt-cinq (25) microns et moins d'un micron. Idéalement, le tampon réfléchissant est modelé sur le bras en porte-à-faux à l'aide d'une photolithographie. L'invention concerne également un procédé de fabrication correspondant de la sonde thermiquement stable résistante à la dérive.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)