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1. (WO2019028129) METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION
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Pub. No.: WO/2019/028129 International Application No.: PCT/US2018/044786
Publication Date: 07.02.2019 International Filing Date: 01.08.2018
IPC:
H01J 37/26 (2006.01) ,H01J 37/244 (2006.01) ,H01J 37/22 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
244
Detectors; Associated components or circuits therefor
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
22
Optical or photographic arrangements associated with the tube
Applicants:
GATAN, INC. [US/US]; 5794 W. Las Positas Blvd. Pleasanton, California 94588, US
Inventors:
JAMES, Edward Michael; US
TWESTEN, Ray Dudley; US
Agent:
TINARI, JR., Nicholas M.; US
SNYDER, Glenn; US
Priority Data:
62/541,34504.08.2017US
Title (EN) METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION
(FR) PROCÉDÉ D'ACQUISITION DE SPECTRE EELS À GRANDE VITESSE
Abstract:
(EN) A system and method are disclosed for acquiring Electron Energy Loss Spectrometry (EELS) spectra in a transmission electron microscope. The inventive system and method maximize spectrum acquisition rate and duty cycle by exposing a first portion of an image sensor to a first spectrum while a previously exposed potion of the sensor is read out of the sensor during some or all of the exposure time.
(FR) L'invention concerne un système et un procédé d'acquisition de spectres de spectrométrie de perte d'énergie électronique (EELS) dans un microscope électronique à transmission. Le système et le procédé de l'invention maximisent le taux d'acquisition de spectre et le cycle de service en exposant une première partie d'un capteur d'image à un premier spectre tandis qu'une partie précédemment exposée du capteur est lue par le capteur pendant une partie ou la totalité du temps d'exposition.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)