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1. (WO2019028082) LASER APPARATUS AND METHOD OF PROCESSING THIN FILMS
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Pub. No.: WO/2019/028082 International Application No.: PCT/US2018/044705
Publication Date: 07.02.2019 International Filing Date: 31.07.2018
IPC:
C23C 14/58 (2006.01) ,B23K 26/082 (2014.01) ,C23C 16/56 (2006.01) ,B23K 26/352 (2014.01) ,B23K 26/08 (2014.01) ,H01S 3/10 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
58
After-treatment
[IPC code unknown for B23K 26/082]
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
56
After-treatment
[IPC code unknown for B23K 26/352]
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
08
Devices involving relative movement between laser beam and workpiece
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
S
DEVICES USING STIMULATED EMISSION
3
Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
10
Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
Applicants:
IPG PHOTONICS CORPORATION [US/US]; 50 Old Webster Road Oxford, MA 01540, US
Inventors:
LIMANOV, Alexander; US
VON DADELSZEN, Michael; US
SCHOENLY, Joshua; US
LEONARDO, Manuel; US
Agent:
KATESHOV, Yuri; US
Priority Data:
62/539,18331.07.2017US
62/549,25423.08.2017US
62/712,79631.07.2018US
Title (EN) LASER APPARATUS AND METHOD OF PROCESSING THIN FILMS
(FR) APPAREIL LASER ET PROCÉDÉ DE TRAITEMENT DE FILMS MINCES
Abstract:
(EN) A method of fiber laser processing of thin film deposited on a substrate includes providing a laser beam from at least one fiber laser which is guided through a beam-shaping unit onto the thin film. The beam-shaping optics is configured to shape the laser beam into a line beam which irradiates a first irradiated thin film area Ab on a surface of the thin film, with the irradiated thin film area Ab being a fraction of the thin film area Af. By continuously displacing the beam shaping optics and the film relative to one another in a first direction at a distance dy between sequential irradiations, a sequence of uniform irradiated thin film areas Ab are formed on the film surface defining thus a first elongated column. There after the beam shaped optics and film are displaced relative to one another at a distance dx in a second direction transverse to the first direction with the distance dx being smaller than a length of the irradiated film area Ab. With the steps performed to form respective columns, the elongated columns overlap one another covering the desired thin film area Af. The dx and dy distances are so selected that each location of the film area Af is exposed to the shaped laser beam during a cumulative predetermined duration.
(FR) L'invention concerne un procédé de traitement par laser à fibre d'un film mince déposé sur un substrat, comprenant l'utilisation d'un faisceau laser, en provenance d'au moins un laser à fibre, qui est guidé à travers une unité de mise en forme de faisceau pour être amené jusqu'au film mince. L'optique de mise en forme de faisceau est conçue pour donner au faisceau laser la forme d'un faisceau linéaire qui éclaire une première zone Ab du film mince éclairé à la surface du film mince, la zone Ab éclairée du film mince correspondant à une fraction de la zone Af du film mince. En déplaçant en continu l'optique de mise en forme de faisceau et le film l'un par rapport à l'autre dans une première direction sur une distance dy entre deux éclairages successifs, une succession de zones Ab homogènes éclairées du film mince sont formées à la surface du film, délimitant ainsi une première colonne allongée. Par la suite, l'optique de mise en forme de faisceau et le film sont déplacés l'un par rapport à l'autre sur une distance dx dans une seconde direction, transversale à la première direction, la distance dx étant inférieure à la longueur d'une zone éclairée Ab du film. Grâce aux étapes mises en œuvre pour former les différentes colonnes, les colonnes allongées se chevauchent les unes les autres recouvrant ainsi la zone Af souhaitée du film mince. Les distances dx et dy sont sélectionnées de façon à ce que chaque emplacement de la zone de film Af soit exposé au faisceau laser mis en forme pendant une durée cumulée prédéterminée.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)