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1. (WO2019027084) APPARATUS FOR SUPPLYING LIQUID CHEMICAL
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Pub. No.: WO/2019/027084 International Application No.: PCT/KR2017/009456
Publication Date: 07.02.2019 International Filing Date: 29.08.2017
IPC:
H01L 21/67 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
Applicants:
주식회사 포톤 POTON CO., LTD. [KR/KR]; 충청남도 천안시 서북구 성거읍 망향로 271 271, Manghyang-ro, Seonggeo-eup, Seobuk-gu Cheonan-si Chungcheongnam-do 31053, KR
Inventors:
조중근 CHO, Jung Keun; KR
Agent:
박윤호 PARK, Youn-Ho; KR
Priority Data:
10-2017-009704531.07.2017KR
Title (EN) APPARATUS FOR SUPPLYING LIQUID CHEMICAL
(FR) APPAREIL D'ALIMENTATION EN PRODUIT CHIMIQUE LIQUIDE
(KO) 약액 공급 장치
Abstract:
(EN) Disclosed is an apparatus for supplying a liquid chemical. The apparatus for supplying a liquid chemical has an inner space in which the liquid chemical is accommodated, and comprises: a pump body including a liquid chemical inlet part which is arranged at a first position inside the inner space and into which the liquid chemical is introduced, and a liquid chemical dispensing part which is arranged at a second position inside the inner space for dispensing the liquid chemical; a rotating screw of which one portion is inserted into the inside of the pump body, and having one end that is rotatably connected to a first surface on the first position in the pump body and another end that is connected to a second surface on the pump body opposite the first surface; a driving motor, which is installed on the second surface and connected to the rotating screw, for causing rotation of the rotating screw; a piston having a plate shape, which is coupled onto the rotating screw, and which shifts from the first position to the second position according to the direction of rotation of the rotating screw, when the rotating screw is rotated; a first bellows tube, which is accommodated in the inner space of the pump body, and of which one end is fixed to the first surface and the other end is fixed to one surface on the piston opposite the first surface; and a second bellows tube, which is accommodated in the inner space of the pump body, and of which one end is fixed to the second surface and the other end is fixed to one surface on the piston opposite the second surface.
(FR) La présente invention concerne un appareil d'alimentation en produit chimique liquide. L'appareil d'alimentation en produit chimique liquide comprend un espace interne dans lequel le produit chimique liquide est reçu et comprend : un corps de pompe doté d'une partie d'entrée de produit chimique liquide qui est disposée à une première position à l'intérieur de l'espace interne et dans laquelle le produit chimique liquide est introduit et d'une partie de distribution de produit chimique liquide qui est disposée à une seconde position à l'intérieur de l'espace interne pour distribuer le produit chimique liquide; une vis rotative dont une partie est insérée dans l'intérieur du corps de pompe et dont une extrémité est reliée de façon rotative à une première surface sur la première position dans le corps de pompe et dont une autre extrémité est reliée à une seconde surface opposée à la première surface sur le corps de pompe; un moteur d'entraînement installé sur la seconde surface et relié à la vis rotative pour provoquer la rotation de la vis rotative; un piston en forme de plaque couplé sur la vis rotative et qui passe de la première position à la seconde position en fonction de la direction de rotation de la vis rotative, lorsque la vis rotative est mise en rotation; un premier tube à soufflet, qui est logé dans l'espace intérieur du corps de pompe et dont une extrémité est reliée à la première surface et dont l'autre extrémité est reliée à une surface opposée à la première surface sur le piston; et un second tube à soufflet logé dans l'espace intérieur du corps de pompe et dont une extrémité est reliée à la seconde surface et dont l'autre extrémité est reliée à une surface opposée à la seconde surface sur le piston.
(KO) 약액 공급 장치가 개시된다. 약액 공급 장치는 약액이 수용되는 내부공간을 갖고, 상기 내부공간의 제1 위치에 배치되고 약액이 유입되는 약액유입부, 상기 내부공간의 제2 위치에 배치되고 상기 약액이 토출되는 약액토출부를 포함하는 펌프바디; 일부분이 상기 펌프바디의 내부로 삽입되고, 일단부가 상기 제1 위치에 배치된 상기 펌프바디의 제1 면에 회전 가능하게 연결되고 타단부가 상기 제1 면에 대향하는 상기 펌프바디의 제2 면에 연결되는 회전스크류; 상기 제2 면에 설치되어 상기 회전스크류에 연결되고, 상기 회전스크류를 회전시키는 구동모터; 상기 회전스크류 상에 결합되고, 상기 회전스크류가 회전하면 상기 회전스크류의 회전방향에 따라 상기 제1 위치 및 제2 위치로 이동하는 플레이트 형태의 피스톤; 상기 펌프바디의 내부공간에 수용되고, 일단부가 상기 제1 면에 고정되고 타단부가 상기 제1 면에 대향하는 상기 피스톤의 일면에 고정되는 제1 벨로우즈관; 및 상기 펌프바디의 내부공간에 수용되고, 일단부가 상기 제2 면에 고정되고 타단부가 상기 제2 면에 대향하는 상기 피스톤의 일면에 고정되는 제2 벨로우즈관을 포함하는 것을 특징으로 한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)