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1. (WO2019027077) POLISHING PAD DRESSER HAVING ROUNDED EDGE PART AND POLISHING DEVICE COMPRISING SAME
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Pub. No.: WO/2019/027077 International Application No.: PCT/KR2017/008624
Publication Date: 07.02.2019 International Filing Date: 09.08.2017
IPC:
B24B 53/017 (2012.01) ,B24B 53/12 (2006.01) ,B65D 53/02 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
24
GRINDING; POLISHING
B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
53
Devices or means for dressing or conditioning abrasive surfaces
017
Devices or means for dressing, cleaning or otherwise conditioning lapping tools
B PERFORMING OPERATIONS; TRANSPORTING
24
GRINDING; POLISHING
B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
53
Devices or means for dressing or conditioning abrasive surfaces
12
Dressing tools; Holders therefor
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
D
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
53
Sealing or packing elements; Sealings formed by liquid or plastic material
02
Collars or rings
Applicants:
새솔다이아몬드공업 주식회사 SAESOL DIAMOND IND. CO., LTD. [KR/KR]; 경기도 안산시 단원구 신원로91번길 61 61, Sinwon-ro 91beon-gil, Danwon-gu Ansan-si, Gyeonggi-do 15423, KR
Inventors:
오광호 OH, Kwang-Ho; KR
김태경 KIM, Tai-Kyung; KR
이상호 LEE, Sang-Ho; KR
Agent:
한양특허법인 HANYANG PATENT FIRM; 서울시 강남구 논현로38길 12, 한양빌딩 Hanyang building, 12, Nonhyeonro 38-gil, Gangnam-gu Seoul 06296, KR
Priority Data:
10-2017-009793602.08.2017KR
Title (EN) POLISHING PAD DRESSER HAVING ROUNDED EDGE PART AND POLISHING DEVICE COMPRISING SAME
(FR) DRESSEUR DE TAMPON DE POLISSAGE AYANT UNE PARTIE BORD ARRONDIE ET DISPOSITIF DE POLISSAGE LE COMPRENANT
(KO) 에지부분이 라운드된 연마패드 드레서 및 그 연마장치
Abstract:
(EN) The present invention relates to a polishing pad dresser, which includes diamond particles formed on a surface thereof and has a rounded edge part, and a polishing device comprising the same, the polishing pad dresser comprising: a flat surface portion, a surface of which is flat from a center of the dresser; a curved portion, a surface of which is formed as a rounded edge; and a slope portion, a surface of which has a predetermined slope angle, wherein: the flat surface portion occupies a portion from a rotating shaft to 89% or less of an outer diameter of the dresser; the curved portion occupies a portion from the rotating shaft beyond 89% of the outer diameter of the dresser to 96% or less thereof; and the slope portion has a slope angle of 5-11 degrees with respect to a parallel extension line of the flat surface portion of the dresser at a point where the slope portion meets the curved portion.
(FR) La présente invention concerne un dresseur de tampon de polissage, qui comprend des particules de diamant formées sur une surface de celui-ci et a une partie bord arrondie, et un dispositif de polissage le comprenant, le dresseur de tampon de polissage comprenant : une partie surface plate, dont une surface est plate à partir d'un centre du dresseur ; une partie incurvée dont une surface est formée sous la forme d'un bord arrondi ; et une partie pente dont une surface a un angle de pente prédéfini : la partie surface plate occupant une partie d'un arbre rotatif à 89 % ou moins d'un diamètre extérieur du dresseur ; la partie incurvée occupant une partie de l'arbre rotatif au-delà de 89 % du diamètre extérieur du dresseur à 96 % ou moins de celui-ci ; et la partie pente ayant un angle de pente de 5-11 degrés par rapport à une ligne d'extension parallèle de la partie surface plate du dresseur en un point où la partie pente croise la partie incurvée.
(KO) 본 발명은 표면에 다이아몬드 입자가 형성된 연마패드 드레서(a polishing pad dresser) 및 연마장치에 있어서, 표면이 드레서의 중심으로부터 평평한 평면부; 표면이 라운드 에지로 형성된 만곡부; 표면이 일정 기울기를 갖는 경사부로 이루이지며, 평면부는 회전축으로부터 드레서 외경의 89%이하까지 위치하고, 만곡부는 회전축으로부터 드레서 외경의 89%보다 크며, 드레서 외경의 96%이하이고, 경사부의 기울기는 상기 만곡부와 만나는 지점에서 상기 드레서 평면부에 대한 평행연장선에 대해 5~11도인 에지부분이 라운드된 연마패드 드레서 및 연마장치에 대한 것이다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)