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1. (WO2019026609) EXPOSURE DEVICE
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Pub. No.: WO/2019/026609 International Application No.: PCT/JP2018/026727
Publication Date: 07.02.2019 International Filing Date: 17.07.2018
IPC:
G03F 7/20 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
株式会社ブイ・テクノロジー V TECHNOLOGY CO., LTD. [JP/JP]; 神奈川県横浜市保土ヶ谷区神戸町134番地 134, Godo-cho, Hodogaya-ku, Yokohama-shi, Kanagawa 2400005, JP
Inventors:
米澤 良 YONEZAWA Makoto; JP
Agent:
坂田 ゆかり SAKATA Yukari; JP
Priority Data:
2017-14884801.08.2017JP
Title (EN) EXPOSURE DEVICE
(FR) DISPOSITIF D'EXPOSITION
(JA) 露光装置
Abstract:
(EN) In scanning exposure light, it is possible to derive the positional relationship of a component on which a mark is formed and a component on which a mark is not formed. An exposure device for moving a mask-holding part (20) in a first direction and exposing the mask-holding part (20), wherein a template (25) is provided on a side surface (20d) of the mask-holding part (20) that is substantially perpendicular to the first direction. When light is irradiated from a light irradiation unit onto the template (25), a camera (18) reads an image in which a pattern irradiated from the light irradiation unit overlaps with a pattern formed on the template (25).
(FR) Lors du balayage de la lumière d'exposition, il est possible de déduire la relation de position entre un composant sur lequel une marque est formée et un composant sur lequel une marque n'est pas formée. L'invention concerne un dispositif d'exposition pour déplacer une pièce de support de masque (20) dans une première direction et pour exposer la pièce de support de masque (20), un gabarit (25) étant disposé sur une surface latérale (20d) de la pièce de support de masque (20) qui est sensiblement perpendiculaire à la première direction. Lorsque la lumière est irradiée sur le gabarit (25) à partir d'un module d'irradiation de lumière, un appareil photo (18) lit une image dans laquelle un motif irradié par le module d'irradiation de lumière chevauche un motif formé sur le gabarit (25).
(JA) 走査露光においてマークを形成した部品とマークを形成していない部品との位置関係を求めることができる。 マスク保持部(20)を第1方向に移動させて露光する露光装置であり、マスク保持部(20)の、第1方向と略直交する側面(20d)にテンプレート(25)が設けられる。光照射部からテンプレート(25)に向けて光が照射されると、カメラ(18)は、光照射部から照射されたパターンと、テンプレート(25)に形成されたパターンとが重なった画像を読み取る。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)