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1. (WO2019026456) VIBRATION DETECTION ELEMENT AND METHOD FOR MANUFACTURING SAME
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Pub. No.: WO/2019/026456 International Application No.: PCT/JP2018/023549
Publication Date: 07.02.2019 International Filing Date: 21.06.2018
IPC:
G01N 5/02 (2006.01) ,B81B 3/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
5
Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
02
by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Applicants:
加藤　史仁 KATO Fumihito [JP/JP]; JP (JP)
国立大学法人大阪大学 OSAKA UNIVERSITY [JP/JP]; 大阪府吹田市山田丘１番１号 1-1, Yamadaoka, Suita-shi, Osaka 5650871, JP
サムコ株式会社 SAMCO INC. [JP/JP]; 京都府京都市伏見区竹田藁屋町３６番地 Warayacho 36, Takeda, Fushimiku, Kyoto-shi, Kyoto 6128443, JP (JP)
Inventors:
加藤　史仁 KATO Fumihito; JP
荻　博次 OGI Hirotsugu; JP
野中　知行 NONAKA Tomoyuki; JP
Agent:
松山　隆夫 MATSUYAMA Takao; JP
Priority Data:
2017-14879301.08.2017JP
Title (EN) VIBRATION DETECTION ELEMENT AND METHOD FOR MANUFACTURING SAME
(FR) ÉLÉMENT DE DÉTECTION DE VIBRATIONS ET SON PROCÉDÉ DE FABRICATION
(JA) 振動検出素子およびその製造方法
Abstract:
(EN) A vibration detection element (10) is provided with base material sections (1-3), a supporting member (22), a supporting member (32), and a vibrator (4). The base material sections (1-3) include a space section (SP) having a bottom surface (21A) and a bottom surface (31A) facing the bottom surface (21A). The supporting member (22) protrudes in the direction from the bottom surface (21A) to the bottom surface (31A) of the space section (SP). The supporting member (32) protrudes in the direction from the bottom surface (31A) to the bottom surface (21A) of the space section. The vibrator (4) is disposed in contact with the supporting member (22) or the supporting member (32) such that the vibrator can vibrate in the space section (SP), said vibrator having a thickness less than 10 μm. Each of the supporting members (22, 32) includes a plurality of supporting sections that prevent the vibrator (4) from coming into contact with the bottom surface (21A) or the bottom surface (31A).
(FR) L'invention concerne un élément de détection de vibrations (10) comprenant des sections de matériau de base (1-3), d'un élément de soutien (22), un élément de soutien (32) et un vibreur (4). Les sections de matériau de base (1-3) comprennent une section d'espace (SP) présentant une surface inférieure (21A) et une surface inférieure (31A) faisant face à la surface inférieure (21A). L'élément de soutien (22) fait saillie dans la direction depuis la surface inférieure (21A) vers la surface inférieure (31A) de la section d'espace (SP). L'élément de soutien (32) fait saillie dans la direction depuis la surface inférieure (31A) vers la surface inférieure (21A) de la section d'espace. Le vibreur (4) est disposé en contact avec l'élément de soutien (22) ou l'élément de soutien (32) de telle sorte que le vibreur puisse vibrer dans la section d'espace (SP), ledit vibreur présentant une épaisseur inférieure à 10 µm. Chacun des éléments de soutien (22, 32) comprend une pluralité de sections de soutien qui empêchent le vibreur (4) d'entrer en contact avec la surface inférieure (21A) ou la surface inférieure (31A).
(JA) 振動検出素子（１０）は、基材（１～３）と、支持部材（２２）と、支持部材（３２）と、振動子（４）とを備える。基材（１～３）は、底面（２１Ａ）と底面（２１Ａ）に対向する底面（３１Ａ）とを有する空間部（ＳＰ）を含む。支持部材（２２）は、空間部（ＳＰ）の底面（２１Ａ）から底面（３１Ａ）の方向へ突出する。支持部材（３２）は、空間部の底面（３１Ａ）から底面（２１Ａ）の方向へ突出する。振動子（４）は、空間部（ＳＰ）内において振動可能に支持部材（２２）または支持部材（３２）に接して配置され、１０μｍ未満の厚みを有する。支持部材（２２，３２）の各々は、振動子（４）が底面（２１Ａ）または底面（３１Ａ）に接触するのを防止する複数の支持部を含む。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)