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1. (WO2019025211) MICROMECHANICAL PRESSSURE SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/025211 International Application No.: PCT/EP2018/069804
Publication Date: 07.02.2019 International Filing Date: 20.07.2018
IPC:
G01L 9/00 (2006.01) ,G01L 9/02 (2006.01) ,G01L 9/04 (2006.01) ,G01L 13/02 (2006.01) ,G01L 15/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
02
by making use of variations in ohmic resistance, e.g. of potentiometers
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
02
by making use of variations in ohmic resistance, e.g. of potentiometers
04
of resistance strain gauges
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
13
Devices or apparatus for measuring differences of two or more fluid pressure values
02
using elastically-deformable members or pistons as sensing elements
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
15
Devices or apparatus for measuring two or more fluid pressure values simultaneously
Applicants:
ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart, DE
Inventors:
MAUL, Robert; DE
HEUCK, Friedjof; DE
Priority Data:
10 2017 213 354.602.08.2017DE
Title (EN) MICROMECHANICAL PRESSSURE SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD
(FR) DISPOSITIF MICROMÉCANIQUE DE CAPTEUR DE PRESSION ET PROCÉDÉ DE FABRICATION CORRESPONDANT
(DE) MIKROMECHANISCHE DRUCKSENSORVORRICHTUNG UND ENTSPRECHENDES HERSTELLUNGSVERFAHREN
Abstract:
(EN) The invention relates to a micromechanical pressure sensor device, and to a corresponding production method. The micromechanical pressure sensor device has a first membrane (3) and an adjoining first cavern (4); a deformation detecting unit (6) arranged in and/or on the first membrane (3) for detecting a deformation of the first membrane (3) due to an external pressure change applied thereto, and due to an internal mechanical deformation of the pressure sensor device; a second membrane (9) and an adjoining second cavern (5); and a second deformation detecting unit (11) arranged in and/or on the second membrane (9) for detecting a deformation of the second membrane (9) due to the internal mechanical deformation of the pressure sensor device, wherein the second membrane (9) is designed such that it cannot be deformed as a result of the external pressure change.
(FR) La présente invention concerne un dispositif micromécanique de capteur de pression et un procédé de fabrication correspondant. Le dispositif micromécanique de capteurs de pression est équipé de : une première membrane (3) et une première cavité (4) contigüe à celle-ci ; un premier système de détection de déformation (6) disposé dans et/ou sur la première membrane (3) pour détecter une déformation de la première membrane (3) en raison d’une variation externe de la pression appliquée à la première membrane et en raison d’une déformation mécanique interne du dispositif de capteur de pression ; une seconde membrane (9) et une seconde cavité (5) contigüe à celle-ci ; et un second système de détection de déformation (11) disposé dans et/ou sur la seconde membrane (9) pour détecter une déformation de la seconde membrane (9) en raison de la déformation mécanique interne du dispositif de capteur de pression, la seconde membrane (9) étant conçue de manière qu’elle n’est pas déformable en raison de la variation externe de pression.
(DE) Die Erfindung schafft eine mikromechanische Drucksensorvorrichtung und ein entsprechendes Herstellungsverfahren. Die Mikromechanische Drucksensorvorrichtung ist ausgestattet mit einer ersten Membran (3) und einer daran angrenzenden ersten Kaverne (4); einer in und/oder auf der ersten Membran (3) angeordneten ersten Verbiegungserfassungseinrichtung (6) zum Erfassen einer Verbiegung der ersten Membran (3) aufgrund einer daran anliegenden externen Druckänderung und aufgrund einer internen mechanischen Verbiegung der Drucksensorvorrichtung; einer zweiten Membran (9) und einer daran angrenzenden zweiten Kaverne (5); und einer in und/oder auf der zweiten Membran (9) angeordneten zweiten Verbiegungserfassungseinrichtung (11) zum Erfassen einer Verbiegung der zweiten Membran (9) aufgrund der internen mechanischen Verbiegung der Drucksensorvorrichtung; wobei die zweite Membran (9) derart gestaltet ist, dass sie aufgrund der externen Druckänderung nicht verbiegbar ist.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)