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1. (WO2019024326) EVAPORATION APPARATUS
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/024326 International Application No.: PCT/CN2017/111251
Publication Date: 07.02.2019 International Filing Date: 16.11.2017
IPC:
C23C 14/24 (2006.01) ,C23C 14/12 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
12
Organic material
Applicants:
武汉华星光电半导体显示技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. [CN/CN]; 中国湖北省武汉市 东湖新技术开发区高新大道666号光谷生物创新园C5栋305室 305 Room, Building C5 Biolake of Optics Valley,No.666 Gaoxin Avenue,, Wuhan East Lake High-tech Development Zone Wuhan, Hubei 430079, CN
Inventors:
沐俊应 MU, Junying; CN
Agent:
深圳翼盛智成知识产权事务所(普通合伙) ESSEN PATENT&TRADEMARK AGENCY; 中国广东省深圳市 福田区深南大道6021号喜年中心A座1709-1711 Hailrun Complex Block A Room 1709-1711 No.6021 Shennan Blvd,, Futian District ShenZhen, Guangdong 518040, CN
Priority Data:
201710639964.431.07.2017CN
Title (EN) EVAPORATION APPARATUS
(FR) APPAREIL D'ÉVAPORATION
(ZH) 蒸镀装置
Abstract:
(EN) An evaporation apparatus (1000), comprising: an evaporating portion (100), nozzles (200), and an output portion (300) provided between the evaporating portion (100) and the nozzles (200). The evaporating portion (100) is used for evaporating an evaporation raw material so as to form evaporated gas; the output portion (300) is used for conveying the evaporated gas to the nozzles (200) from the evaporating portion (100), wherein the surface of the output portion (300) facing a substrate (2000) is a curved surface (301); and the nozzles (200) are used for conveying the evaporated gas to the substrate (2000).
(FR) L'invention concerne un appareil d'évaporation (1000), lequel appareil comprend : une partie d'évaporation (100), des buses (200), et une partie de sortie (300) disposée entre la partie d'évaporation (100) et les buses (200). La partie d'évaporation (100) est utilisée pour évaporer une matière première d'évaporation de façon à former un gaz évaporé ; la partie de sortie (300) est utilisée pour transporter le gaz évaporé vers les buses (200) à partir de la partie d'évaporation (100), la surface de la partie de sortie (300) faisant face à un substrat (2000) étant une surface incurvée (301) ; et les buses (200) sont utilisées pour acheminer le gaz évaporé vers le substrat (2000).
(ZH) 一种蒸镀装置(1000),包括:蒸发部(100)、喷嘴(200)及设置在所述蒸发部(100)和所述喷嘴(200)之间的输出部(300);所述蒸发部(100),用于蒸发蒸镀原料以形成蒸发气体;所述输出部(300),用于将所述蒸发气体从所述蒸发部(100)传输至所述喷嘴(200),其中所述输出部(300)面向基板(2000)的一面为弧面(301);所述喷嘴(200),用于将所述蒸发气体传输给所述基板(2000)。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)