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1. (WO2019009065) SUBSTRATE STORAGE CONTAINER
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Pub. No.: WO/2019/009065 International Application No.: PCT/JP2018/023311
Publication Date: 10.01.2019 International Filing Date: 19.06.2018
IPC:
H01L 21/673 (2006.01) ,B65D 43/02 (2006.01) ,B65D 53/02 (2006.01) ,B65D 85/86 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
D
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
43
Lids or covers for rigid or semi-rigid containers
02
Removable lids or covers
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
D
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
53
Sealing or packing elements; Sealings formed by liquid or plastic material
02
Collars or rings
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
D
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85
Containers, packaging elements or packages, specially adapted for particular articles or materials
86
for electrical components
Applicants:
信越ポリマー株式会社 SHIN-ETSU POLYMER CO.,LTD. [JP/JP]; 東京都千代田区神田須田町一丁目9番地 9, Kandasuda-cho 1chome, Chiyoda-ku Tokyo 1010041, JP
Inventors:
小川 統 OGAWA Osamu; JP
Agent:
坂本 智弘 SAKAMOTO Tomohiro; JP
Priority Data:
2017-13370807.07.2017JP
Title (EN) SUBSTRATE STORAGE CONTAINER
(FR) RÉCIPIENT DE STOCKAGE DE SUBSTRAT
(JA) 基板収納容器
Abstract:
(EN) The present invention provides a substrate storage container (1) provided with: a container body (10) in which a substrate (W) is stored; a lid member (20) which closes an opening (11) of the container body (10); a lock mechanism with which the lid member (20) is fitted and which is locked on a portion to be locked of the container body (10); and a packing (P) interposed between the container body (10) and the lid member (20). The packing (P) includes a first packing (30) attached to the container body (10), and a second packing (40) attached to the lid member (20). The first packing (30) and the second packing (40), when viewed from a direction orthogonal to a closing direction (H) of the lid member (20), is positioned on the inside of the container body (10) with respect to the position of the portion to be locked. In this way, it is possible to improve sealing property with respect to internal negative pressure and positive pressure, and to provide a substrate storage container with improved internal cleanliness.
(FR) La présente invention concerne un récipient de stockage de substrat (1) comprenant : un corps de récipient (10) dans lequel un substrat (W) est stocké; un élément de couvercle (20) qui renferme une ouverture (11) du corps de récipient (10); un mécanisme de verrouillage avec lequel l'élément de couvercle (20) est ajusté et qui est verrouillé sur une partie à verrouiller du corps de récipient (10); et une garniture (P) interposée entre le corps de récipient (10) et l'élément de couvercle (20). La garniture (P) comprend une première garniture (30) fixée au corps de récipient (10), et une seconde garniture (40) fixée à l'élément de couvercle (20). La première garniture (30) et la seconde garniture (40), lorsqu'elles sont vues depuis une direction orthogonale à une direction de fermeture (H) de l'élément de couvercle (20), sont positionnées sur l'intérieur du corps de récipient (10) par rapport à la position de la partie à verrouiller. De cette manière, il est possible d'améliorer la propriété d'étanchéité vis-à-vis de la pression négative interne et de la pression positive, et de fournir un récipient de stockage de substrat ayant une propreté interne améliorée.
(JA) 本発明は、基板(W)を収納する容器本体(10)と、容器本体(10)の開口(11)を閉止する蓋体(20)と、蓋体(20)に設けられ、容器本体(10)の被係止部に係止される施錠機構と、容器本体(10)及び蓋体(20)との間に介在されるパッキン(P)と、を備える基板収納容器(1)であって、パッキン(P)は、容器本体(10)に取り付けられる第1パッキン(30)と、蓋体(20)に取り付けられる第2パッキン(40)と、を含み、第1パッキン(30)及び第2パッキン(40)は、蓋体(20)の閉止方向(H)に直交する方向から見たとき、被係止部の位置よりも、容器本体(10)の内側に位置するものである。これにより、内部の陰圧及び陽圧に対するシール性を向上させるとともに、内部の清浄性を向上させる基板収納容器を提供することができる。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)