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1. (WO2019009035) DISPLACEMENT MAGNIFYING MECHANISM, POLISHING DEVICE, ACTUATOR, DISPENSER, AND AIR VALVE
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Pub. No.: WO/2019/009035 International Application No.: PCT/JP2018/022644
Publication Date: 10.01.2019 International Filing Date: 13.06.2018
IPC:
H02N 2/04 (2006.01) ,B24B 37/34 (2012.01) ,H01L 41/053 (2006.01) ,H01L 41/09 (2006.01)
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
N
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2
Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
02
producing linear motion, e.g. actuators; Linear positioners
04
Constructional details
B PERFORMING OPERATIONS; TRANSPORTING
24
GRINDING; POLISHING
B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37
Lapping machines or devices; Accessories
34
Accessories
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02
Details
04
of piezo-electric or electrostrictive elements
053
Mounts, supports, enclosures or casings
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08
Piezo-electric or electrostrictive elements
09
with electrical input and mechanical output
Applicants:
有限会社メカノトランスフォーマ MECHANO TRANSFORMER CORPORATION [JP/JP]; 東京都千代田区岩本町二丁目7番12号 ビルックスNo.3 4階 4F BUILDX No3, 2-7-12, Iwamoto-cho, Chiyoda-ku, Tokyo 1010032, JP
Inventors:
徐 世傑 CHEE Sze Keat; JP
矢野 健 YANO Takeshi; JP
矢野 昭雄 YANO Akio; JP
Agent:
特許業務法人白坂 SHIRASAKA & PATENT PARTNERS; 東京都千代田区丸の内1丁目5番1号 新丸の内ビルディング10階EGG JAPAN EGG JAPAN 10F Shin-Marunouchi Building 1-5-1 Marunouchi, Chiyoda-ku, Tokyo 1006510, JP
Priority Data:
2017-13406207.07.2017JP
Title (EN) DISPLACEMENT MAGNIFYING MECHANISM, POLISHING DEVICE, ACTUATOR, DISPENSER, AND AIR VALVE
(FR) MÉCANISME D'AMPLIFICATION DE DÉPLACEMENT, DISPOSITIF DE POLISSAGE, ACTIONNEUR, DISTRIBUTEUR ET VANNE D'AIR
(JA) 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ
Abstract:
(EN) A displacement magnifying mechanism is provided with: a base portion as a substrate; a first attachment portion and a second attachment portion which are provided on a surface on one side of the base portion; a first piezoelectric element and a second piezoelectric element of which one ends are respectively attached to the first attachment portion and the second attachment portion; an operating portion which is connected to other ends of the first piezoelectric element and the second piezoelectric element, and which generates a displacement due to expansion and contraction of the piezoelectric element; and a link portion which is disposed at the center of the first piezoelectric element and the second piezoelectric element and links the operating portion with the base portion, the link portion being made of a material having a Young's modulus higher than that of the first piezoelectric element and the second piezoelectric element.
(FR) L'invention concerne un mécanisme d'amplification de déplacement qui comprend : une partie de base comme un substrat ; une première partie de fixation et une seconde partie de fixation qui sont disposées sur une surface sur un côté de la partie de base ; un premier élément piézoélectrique et un second élément piézoélectrique dont des premières extrémités sont respectivement fixées à la première partie de fixation et à la seconde partie de fixation ; une partie d'actionnement qui est reliée aux autres extrémités du premier élément piézoélectrique et du second élément piézoélectrique, et qui génère un déplacement dû à la dilatation et à la contraction de l'élément piézoélectrique ; et une partie de liaison qui est disposée au centre du premier élément piézoélectrique et du second élément piézoélectrique et relie la partie d'actionnement à la partie de base, la partie de liaison étant réalisée en un matériau ayant un module de Young supérieur à celui du premier élément piézoélectrique et du second élément piézoélectrique.
(JA) 変位拡大機構は、基盤となる基部と、基部の一方側の面に設けられた第1の取付部および第2の取付部と、第1の取付部および第2の取付部に、それぞれその一端が取り付けられる第1の圧電素子および第2の圧電素子と、第1の圧電素子および第2の圧電素子の他端に接続される、圧電素子の伸縮により変位を生じる作用部と、第1の圧電素子と第2の圧電素子の間の中央に配置され、作用部と基部を連結し、第1の圧電素子および第2の圧電素子よりも高いヤング率を有する材質からなる連結部と、を備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)