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1. (WO2019008889) SUBSTRATE MOUNTING STAND FOR HEATING SEMICONDUCTOR SUBSTRATE
Latest bibliographic data on file with the International Bureau    Submit observation
Pub. No.: WO/2019/008889 International Application No.: PCT/JP2018/017685
Publication Date: 10.01.2019 International Filing Date: 08.05.2018
IPC:
H01L 21/205 (2006.01) ,C23C 14/50 (2006.01) ,C23C 16/46 (2006.01) ,H01L 21/3065 (2006.01) ,H01L 21/683 (2006.01) ,H05B 3/10 (2006.01) ,H05B 3/20 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
20
Deposition of semiconductor materials on a substrate, e.g. epitaxial growth
205
using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
50
Substrate holders
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44
characterised by the method of coating
46
characterised by the method used for heating the substrate
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
04
the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18
the devices having semiconductor bodies comprising elements of the fourth group of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
302
to change the physical characteristics of their surfaces, or to change their shape, e.g. etching, polishing, cutting
306
Chemical or electrical treatment, e.g. electrolytic etching
3065
Plasma etching; Reactive-ion etching
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
3
Ohmic-resistance heating
10
Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
3
Ohmic-resistance heating
20
Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
Applicants:
住友電気工業株式会社 SUMITOMO ELECTRIC INDUSTRIES, LTD. [JP/JP]; 大阪府大阪市中央区北浜四丁目５番３３号 5-33, Kitahama 4-chome, Chuo-ku, Osaka-shi, Osaka 5410041, JP
Inventors:
新間　健司 SHINMA Kenji; JP
西本　悦弘 NISHIMOTO Yoshihiro; JP
先田　成伸 SAKITA Shigenobu; JP
三雲　晃 MIKUMO Akira; JP
Agent:
中田　元己 NAKATA Motomi; JP
森田　剛史 MORITA Takeshi; JP
高城　政浩 TAKAGI Masahiro; JP
緒方　大介 OGATA Daisuke; JP
Priority Data:
2017-13349607.07.2017JP
Title (EN) SUBSTRATE MOUNTING STAND FOR HEATING SEMICONDUCTOR SUBSTRATE
(FR) SOCLE DE MONTAGE DE SUBSTRAT SERVANT À CHAUFFER UN SUBSTRAT SEMI-CONDUCTEUR
(JA) 半導体基板加熱用の基板載置台
Abstract:
(EN) This substrate mounting stand for heating a semiconductor substrate comprises: a ceramic disc-shaped part that has a mounting surface on the upper surface thereof, said mounting surface being configured such that a semiconductor substrate can be mounted thereto; and a plurality of heating circuits that are respectively embedded in the disc-shaped part so as to extend parallel to the mounting surface within a plurality of regions delineated by partitioning the disc-shaped part into concentric circles when viewed from the mounting surface side. Among the plurality of heating circuits, an inner heating circuit is positioned closer to the mounting surface than an outer heating circuit is.
(FR) La présente invention concerne un socle de montage de substrat servant à chauffer un substrat semi-conducteur, comprenant : un élément discoïde en céramique qui présente une surface de montage sur sa surface supérieure, ladite surface de montage étant structurée de telle sorte que le substrat semi-conducteur est monté sur cette dernière ; et une pluralité de circuits de chauffage qui sont respectivement intégrés dans l'élément discoïde en céramique de façon à s'étendre parallèlement à la surface de montage dans plusieurs régions, lesdites régions étant délimitées par division en cercles concentriques de l'élément discoïde en céramique lorsqu'il est vu depuis un côté de surface de montage. Dans la pluralité de circuits de chauffage, un circuit de chauffage intérieur est placé à un emplacement qui est plus proche de la surface de montage qu'un circuit de chauffage extérieur.
(JA) 半導体基板加熱用の基板載置台は、上面に半導体基板を載置するように構成された載置面を有するセラミックス製の円板形状部と、載置面側から見て、同心円状に区分することで画定される複数の領域内に載置面に対して平行に延在するように円板形状部にそれぞれ埋設された複数の発熱回路と、を備える。複数の発熱回路のうち外側の発熱回路よりも内側の発熱回路の方が載置面に近い位置に配置されている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)