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1. (WO2019007772) MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD
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Pub. No.: WO/2019/007772 International Application No.: PCT/EP2018/067216
Publication Date: 10.01.2019 International Filing Date: 27.06.2018
IPC:
G01L 19/00 (2006.01) ,G01L 19/06 (2006.01) ,B32B 3/30 (2006.01) ,G01D 11/24 (2006.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19
Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19
Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
06
Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
B PERFORMING OPERATIONS; TRANSPORTING
32
LAYERED PRODUCTS
B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
3
Layered products essentially comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products essentially having particular features of form
26
characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids
30
characterised by a layer formed with recesses or projections, e.g. grooved, ribbed
G PHYSICS
01
MEASURING; TESTING
D
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; TRANSFERRING OR TRANSDUCING ARRANGEMENTS NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
11
Component parts of measuring arrangements not specially adapted for a specific variable
24
Housings
Applicants:
ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart, DE
Inventors:
LINDEMANN, Timo; DE
ROHLFING, Franziska; DE
DOERING, Christian; DE
FRIEDRICH, Thomas; DE
SCHELLING, Christoph; DE
KENNTNER, Johannes; DE
Priority Data:
10 2017 211 451.705.07.2017DE
Title (EN) MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD
(FR) DISPOSITIF DE DÉTECTION MICROMÉCANIQUE ET PROCÉDÉ DE FABRICATION ASSOCIÉ
(DE) MIKROMECHANISCHE SENSORVORRICHTUNG UND ENTSPRECHENDES HERSTELLUNGSVERFAHREN
Abstract:
(EN) The invention relates to a micromechanical sensor device and to a corresponding production method. The micromechanical sensor device is equipped with a sensor substrate (2) having a front face (VS) and a rear face (RS), a sensor area (1) provided on the front face (VS), which may be brought into contact with an ambient medium, and a capping device (4) mounted on the front side (VS) for capping the sensor area (1). One or more capillaries (3) are formed in the capping device (4) and/or in the sensor substrate (2), through which one or more capillaries the ambient medium may be passed onto the sensor area (1), wherein, at least in parts, a liquid-repelling coat (5) is provided on the inner walls (I) of the capillaries (3).
(FR) L'invention concerne un dispositif de détection micromécanique et un procédé de fabrication associé. Le dispositif de détection micromécanique est muni d'un substrat de détection (2) présentant une face avant (VS) et une face arrière (RS), une zone de détection (1) ménagée sur la face avant (VS) et pouvant être mise en contact avec un milieu environnant, et un dispositif d'encapsulation (4) appliqué sur la face avant (VS) pour l'encapsulation de la zone de détection (1). Dans le dispositif d'encapsulation (4) et/ou dans le substrat de détection (2) sont formés un ou plusieurs capillaires (3) servant à diriger le milieu environnant sur la zone de détection (1), une couche hydrophobe (5) étant appliquée au moins par endroits sur les parois intérieures (I) des capillaires (3).
(DE) Die Erfindung schafft eine mikromechanische Sensorvorrichtung und ein entsprechendes Herstellungsverfahren. Die mikromechanische Sensorvorrichtung ist ausgestattet mit einem Sensorsubstrat (2) mit einer Vorderseite (VS) und einer Rückseite (RS), einem auf der Vorderseite (VS) vorgesehenen Sensorbereich (1), welcher mit einem Umweltmedium in Kontakt bringbar ist, und einer auf der Vorderseite (VS) aufgebrachten Verkappungseinrichtung (4) zum Verkappen des Sensorbereichs (1). In der Verkappungseinrichtung (4) und/oder im Sensorsubstrat (2) sind ein oder mehrere Kapillaren (3) zum Durchleiten des Umweltmediums auf den Sensorbereich (1) gebildet, wobei auf den Innenwänden (I) der Kapillaren (3) zumindest bereichsweise eine flüssigkeitsabweisende Schicht (5) vorgesehen ist.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)