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1. (WO2019005648) FILTER WITH NON-HORIZONTAL CAVITY
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Pub. No.: WO/2019/005648 International Application No.: PCT/US2018/039236
Publication Date: 03.01.2019 International Filing Date: 25.06.2018
IPC:
B01D 46/00 (2006.01) ,B01D 46/42 (2006.01) ,H01L 21/02 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
D
SEPARATION
46
Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
B PERFORMING OPERATIONS; TRANSPORTING
01
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
D
SEPARATION
46
Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
42
Auxiliary equipment or operation thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
Applicants:
MOTT CORPORATION [US/US]; 84 Spring Lane Farmington, CT 06032, US
Inventors:
SIOK, Matthew C.; US
ROSENBERGER, John E.; US
RUBOW, Kenneth L.; US
BEAUNE, Allen; US
Agent:
BLUNI, Scott T.; US
MASSENGILL, Brandon; US
Priority Data:
62/527,41430.06.2017US
Title (EN) FILTER WITH NON-HORIZONTAL CAVITY
(FR) FILTRE À CAVITÉ NON HORIZONTALE
Abstract:
(EN) Filters that include non-horizontal filter cavities, such as cavities that are vertically, diagonally, or otherwise non-horizontally with respect to a filter block.
(FR) L’invention concerne des filtres qui comprennent des cavités de filtre non horizontales, telles que des cavités qui sont verticales, diagonales, ou non horizontales par rapport à un bloc de filtre.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)