Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2019001873) METHODS AND PATTERNING DEVICES AND APPARATUSES FOR MEASURING FOCUS PERFORMANCE OF A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD

International Application Status
DateTitleViewDownload
21.02.2019International Application Status ReportHTML, PDF, XMLPDF, XML


Published International Application
DateTitleViewDownload
03.01.2019Initial Publication with ISR( (A1 01/2019))PDF (56p.)PDF (56p.), ZIP(XML + TIFFs)
03.01.2019Request for RectificationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)


Search and Examination-Related Documents
DateTitleViewDownload
03.01.2019(ISA/237) Written Opinion of the International Searching AuthorityPDF (7p.)PDF (7p.), ZIP(XML + TIFFs)
03.01.2019(ISA/210) International Search ReportPDF (4p.)PDF (4p.), ZIP(XML + TIFFs)
03.01.2019Search StrategyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)


Related Documents on file at the International Bureau
DateTitleViewDownload
22.01.2019(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.01.2019(IB/301) Notification of receipt of record copyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.01.2019(IB/304) Notification Concerning Submission or Transmittal of Priority DocumentPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.01.2019(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.01.2019Rectified SheetsPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.01.2019(RO/107) Invitation Relating to Certain Parts of the International Application that Are, or Appear to Be, MissingPDF (2p.)PDF (2p.), ZIP(XML + TIFFs)
03.01.2019Validation LogPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.01.2019(RO/101) Request formPDF (5p.)
03.01.2019(ISA/217) Notification of Decision Concerning Request for RectificationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
03.01.2019Application Body as FiledPDF (52p.)PDF (52p.), ZIP(XML + TIFFs)
03.01.2019Priority DocumentPDF (60p.)PDF (60p.), ZIP(XML + TIFFs)