Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2019001680) A DOOR CONFIGURED FOR SEALING AN OPENING IN A VACUUM PROCESSING SYSTEM, VACUUM PROCESSING SYSTEM AND METHOD FOR OPERATING A DOOR
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2019/001680 International Application No.: PCT/EP2017/065699
Publication Date: 03.01.2019 International Filing Date: 26.06.2017
IPC:
H01L 21/67 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
Applicants:
LINDENBERG, Ralph [DE/DE]; DE (US)
RAJU, Brijesh [IN/IN]; IN (US)
KEMMERER, Martin [DE/DE]; DE (US)
APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054, US
Inventors:
LINDENBERG, Ralph; DE
RAJU, Brijesh; IN
KEMMERER, Martin; DE
Agent:
ZIMMERMANN & PARTNER PATENTANWÄLTE MBB; Josephspitalstr. 15 80331 München, DE
Priority Data:
Title (EN) A DOOR CONFIGURED FOR SEALING AN OPENING IN A VACUUM PROCESSING SYSTEM, VACUUM PROCESSING SYSTEM AND METHOD FOR OPERATING A DOOR
(FR) PORTE CONFIGURÉE POUR SCELLER UNE OUVERTURE DANS UN SYSTÈME DE TRAITEMENT SOUS VIDE, SYSTÈME DE TRAITEMENT SOUS VIDE ET PROCÉDÉ POUR FAIRE FONCTIONNER UNE PORTE
Abstract:
(EN) A door (100) configured for sealing an opening in a vacuum processing system (200) is provided. The door (100) includes: a moveable member (110); and a flexible closure (120) configured to be moveable from an open position to a closed position, wherein the flexible closure (120) is configured to provide a vacuum-tight seal in the closed position.
(FR) L'invention concerne une porte (100) configurée pour sceller une ouverture dans un système de traitement sous vide (200). La porte (100) comprend : un élément mobile (110) ; et une fermeture souple (120) configurée pour être mobile d'une position ouverte à une position fermée, la fermeture souple (120) étant configurée pour assurer une étanchéité au vide dans la position fermée.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)