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1. (WO2019000491) EVAPORATION SOURCE DEVICE FOR VAPOR DEPOSITION
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Pub. No.: WO/2019/000491 International Application No.: PCT/CN2017/092663
Publication Date: 03.01.2019 International Filing Date: 12.07.2017
IPC:
C23C 14/24 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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characterised by the process of coating
24
Vacuum evaporation
Applicants:
武汉华星光电半导体显示技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. [CN/CN]; 中国湖北省武汉市 东湖新技术开发区高新大道666号光谷生物创新园C5栋305室 305 Room, Building C5, Biolake of Optics Valley, No. 666 Gaoxin Avenue, Wuhan East Lake High-tech Development Zone, Wuhan, Hubei 430070, CN
Inventors:
余威 YU, Wei; CN
Agent:
深圳市铭粤知识产权代理有限公司 MING & YUE INTELLECTUAL PROPERTY LAW FIRM; 中国广东省深圳市南山区南山街道前海路泛海城市广场2栋604室 Room 604 Building 2, Oceanwide City Square, Qianhai Road, Nanshan Street, Nanshan District Shenzhen, Guangdong 518066, CN
Priority Data:
201710505480.028.06.2017CN
Title (EN) EVAPORATION SOURCE DEVICE FOR VAPOR DEPOSITION
(FR) DISPOSITIF DE SOURCE D'ÉVAPORATION POUR DÉPÔT EN PHASE VAPEUR
(ZH) 蒸镀用的蒸发源装置
Abstract:
(EN) An evaporation source device for vapor deposition. The evaporation source device comprises a heating vessel (10) having an opening in the top surface and a first baffle (20) and a second baffle (30) covering the opening of the heating vessel (10); the first baffle (20) and the second baffle (30) being provided with through holes respectively; and the first baffle (20) and the second baffle (30) sliding in relation to each other, such that the through holes on the two baffles are joined together at two or more different joining positions to form a vapor deposition channel (H) in communication with the heating vessel (10).
(FR) Cette invention concerne un dispositif de source d'évaporation pour le dépôt en phase vapeur. Le dispositif de source d'évaporation comprend une cuve de chauffage (10) ayant une ouverture dans la surface supérieure et un premier déflecteur (20) et un second déflecteur (30) recouvrant l'ouverture de la cuve de chauffage (10). Le premier déflecteur (20) et le second déflecteur (30) sont pourvus de trous traversants respectivement. Le premier déflecteur (20) et le second déflecteur (30) coulissent l'un par rapport à l'autre, de telle sorte que les trous traversants sur les deux déflecteurs se rejoignent dans deux positions de jonction différentes ou plus, de sorte à former un canal de dépôt en phase vapeur (H) en communication avec la cuve de chauffage (10).
(ZH) 一种蒸镀用的蒸发源装置,包括顶面开口的加热容器(10)以及盖设于加热容器(10)开口的第一挡板(20)和第二挡板(30),第一挡板(20)和第二挡板(30)上分别开设有贯穿孔;第一挡板(20)和第二挡板(30)可相对滑动,使二者上的贯穿孔在至少两个不同的配合位置配合形成连通加热容器(10)的蒸镀通道(H)。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)