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1. (WO2018234233) FILM RESISTOR AND THIN-FILM SENSOR
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Pub. No.: WO/2018/234233 International Application No.: PCT/EP2018/066099
Publication Date: 27.12.2018 International Filing Date: 18.06.2018
IPC:
G01L 9/06 (2006.01) ,G01L 1/18 (2006.01) ,H01C 17/065 (2006.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
02
by making use of variations in ohmic resistance, e.g. of potentiometers
06
of piezo-resistive devices
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1
Measuring force or stress, in general
18
using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
C
RESISTORS
17
Apparatus or processes specially adapted for manufacturing resistors
06
adapted for coating resistive material on a base
065
by thick-film techniques, e.g. serigraphy
Applicants:
TDK ELECTRONICS AG [DE/DE]; Rosenheimer Str. 141 e 81671 München, DE
Inventors:
MILKE, Bettina; DE
OSTRICK, Bernhard; DE
Agent:
EPPING HERMANN FISCHER PATENTANWALTSGESELLSCHAFT MBH; Schloßschmidstr. 5 80639 München, DE
Priority Data:
10 2017 113 401.819.06.2017DE
Title (EN) FILM RESISTOR AND THIN-FILM SENSOR
(FR) RÉSISTANCE À COUCHE ET CAPTEUR À COUCHE MINCE
(DE) SCHICHTWIDERSTAND UND DÜNNFILMSENSOR
Abstract:
(EN) The invention relates to a film resistor comprising a piezoresistive layer, the piezoresistive layer containing a first transition metal carbide. Further disclosed is a thin-film sensor comprising the film resistor.
(FR) L'invention concerne une résistance à couche qui présente une couche piézorésistive, ladite couche piézorésistive contenant un premier carbure de métal de transition. L'invention concerne en outre un capteur à couche mince comportant ladite résistance à couche.
(DE) Es wird ein Schichtwiderstand angegeben, der eine piezioresistive Schicht aufweist, wobei die piezoresistive Schicht ein erstes Übergangsmetallcarbid enthält. Weiterhin wird ein Dünnfilmsensor aufweisend den Schichtwiderstand angegeben.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)