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1. (WO2018230380) METHOD FOR PRODUCING POLYSILICON
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Pub. No.: WO/2018/230380 International Application No.: PCT/JP2018/021363
Publication Date: 20.12.2018 International Filing Date: 04.06.2018
Chapter 2 Demand Filed: 02.11.2018
IPC:
C01B 33/035 (2006.01)
C CHEMISTRY; METALLURGY
01
INORGANIC CHEMISTRY
B
NON-METALLIC ELEMENTS; COMPOUNDS THEREOF
33
Silicon; Compounds thereof
02
Silicon
021
Preparation
027
by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
035
by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
Applicants:
株式会社トクヤマ TOKUYAMA CORPORATION [JP/JP]; 山口県周南市御影町1番1号 1-1, Mikage-cho, Shunan-shi, Yamaguchi 7458648, JP
Inventors:
鎌田 誠 KAMADA, Makoto; JP
Agent:
特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK; 大阪府大阪市北区天神橋2丁目北2番6号 大和南森町ビル Daiwa Minamimorimachi Building, 2-6, Tenjinbashi 2-chome Kita, Kita-ku, Osaka-shi, Osaka 5300041, JP
Priority Data:
2017-11912516.06.2017JP
Title (EN) METHOD FOR PRODUCING POLYSILICON
(FR) PROCÉDÉ DE PRODUCTION DE SILICIUM POLYCRISTALLIN
(JA) ポリシリコンの製造方法
Abstract:
(EN) The present invention achieves an efficient method for producing polysilicon. The present invention is a method for producing polysilicon by the Siemens process, wherein a reactor is connected to exhaust gas treatment equipment by a shutoff valve provided on an exhaust gas duct, the shutoff valve is provided in the vicinity of an exhaust gas outlet of the reactor, and exhaust gas is cooled by an indirect cooler between the exhaust gas outlet of the reactor and the shutoff valve.
(FR) La présente invention concerne un procédé efficace de production de silicium polycristallin. La présente invention concerne un procédé de production de silicium polycristallin par le procédé Siemens, dans lequel un réacteur est connecté à un équipement de traitement de gaz d'échappement par un robinet d'arrêt disposé sur un conduit de gaz d'échappement, le robinet d'arrêt est disposé à proximité d'une sortie de gaz d'échappement du réacteur, et le gaz d'échappement est refroidi par un refroidisseur indirect entre la sortie de gaz d'échappement du réacteur et le robinet d'arrêt.
(JA) ポリシリコンの効率的な製造方法を実現する。本発明は、ジーメンス法によるポリシリコンの製造方法であり、反応器と排ガス処理設備とは、排ガス配管に設けられた遮断弁によって接続されており、上記遮断弁は、上記反応器の排ガス出口の近傍に設けられており、上記反応器の排ガス出口と上記遮断弁との間において、間接冷却型の冷却器により排ガスを冷却する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)