Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2018226966) MAGNETIC-FIELD-ASSISTED PLASMA COATING SYSTEM
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/226966 International Application No.: PCT/US2018/036474
Publication Date: 13.12.2018 International Filing Date: 07.06.2018
IPC:
C23C 14/12 (2006.01) ,C23C 14/24 (2006.01) ,C23C 14/32 (2006.01) ,C23C 14/35 (2006.01) ,C23C 16/30 (2006.01) ,C23C 16/32 (2006.01) ,C23C 16/50 (2006.01) ,C23C 16/52 (2006.01) ,F02F 1/24 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
12
Organic material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
32
by explosion; by evaporation and subsequent ionisation of the vapours
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
35
by application of a magnetic field, e.g. magnetron sputtering
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
22
characterised by the deposition of inorganic material, other than metallic material
30
Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
22
characterised by the deposition of inorganic material, other than metallic material
30
Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
32
Carbides
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44
characterised by the method of coating
50
using electric discharges
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44
characterised by the method of coating
52
Controlling or regulating the coating process
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
02
COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
F
CYLINDERS, PISTONS, OR CASINGS FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
1
Cylinders; Cylinder heads
24
Cylinder heads
Applicants:
BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY [US/US]; 450 Administration Building East Lansing, Michigan 48824-1046, US
FRAUNHOFER USA [US/US]; 1449 Engineering Research Ct East Lansing, Michigan 48824, US
Inventors:
SCHUELKE, Thomas; US
BECKER, Michael; US
HAUBOLD, Lars; US
FAN, Qi Hua; US
Agent:
FALCOFF, Monte L.; US
AMBROSE, John; US
AQUINO, Damian; US
BARNETT, Scott D.; US
BENSON, Tyson B.; US
BERBERICH, Jeanette M.; US
BRENNAN, Michael P.; US
BRITT, Nancy K.; US
BROCK, Christopher M.; US
CASTELLANO, John A., III; US
CAUBLE, Christopher M.; US
CHANG, Alex C.; US
CHAPP, Jeffrey J.; US
CHO, David J.; US
CUTLER, Matthew L.; US
DALEY, Donald J.; US
DEAVER, Darin W.; US
DELASSUS, Gregory S.; US
DOERR, Michael P.; US
DOWDY, Stephanie L.; US
DRYSDALE, Nicholas S.; US
ELCHUK, Mark D.; US
ERJAVAC, Stanley M.; US
FITZPATRICK, John; US
FORBIS, Glenn E.; US
FOSS, Stephen J.; US
FRANKLIN, Clarence C.; US
FRENTRUP, Mark A.; US
FULLER, Roland, III; US
FUSSNER, Anthony G.; US
GAMBLE, Michael D.; US
HEIST, Jason A.; US
HILTON, Michael E.; US
HOYT, Blair M.; US
KELLER, Paul A.; US
KESKAR, Hemant; US
KIM, Paul M.; US
KIM, Sung Pil; US
KORAL, Elisabeth; US
KOTSIS, Damian H.; US
KOZU, Kiyoshi; US
LAFATA, Joseph M.; US
LEE, Kisuk; US
LUCHSINGER, James B.; US
MACINTYRE, Timothy D.; US
MALINZAK, Michael; US
MARTIN, Timothy J.; US
MASSEY, Ryan W.; US
MEYER, Greg; US
MIERZWA, Kevin; US
MILLER, Christopher K.; US
MOUSTAKAS, George D.; US
NABI, Tarik M.; US
NYE, Michael; US
ODELL, Elizabeth D.; US
OLSON, Stephen T.; US
PANKA, Brian G.; US
RAKERS, Leanne; US
RICHMOND, Derek; US
ROBINSON, Douglas A.; US
SCHIANO, Thomas E.; US
SCHIVLEY, Gregory G.; US
SCHMIDT, Michael J.; US
SEITZ, Brent G.; US
SIMINSKI, Robert M.; US
SMITH, Corey E.; US
SMITH, Michael L.; US
SNYDER, Jeffrey L.; US
SUTER, David L.; US
TAYLOR, Michael L.; US
TAYLOR, W. R. Duke; US
TEICH, Michael L.; US
THOMAS, Michael J.; US
TUCKER, David J., Jr.; US
UTYKANSKI, David P.; US
VARCO, Michael A.; US
WADE, Bryant E.; US
WALKER, Donald G.; US
WALSH, JR., Joseph E.; US
WANGEROW, Steven; US
WARNER, Richard W.; US
WAXMAN, Andrew M.; US
WELCH, Gerald T.; US
WHEELOCK, Bryan K.; US
WIGGINS, Michael D.; US
WOODSIDE-WOJTALA, Jennifer; US
YACURA, Gary D.; US
ZALOBSKY, Michael D.; US
Priority Data:
62/516,79708.06.2017US
Title (EN) MAGNETIC-FIELD-ASSISTED PLASMA COATING SYSTEM
(FR) SYSTÈME DE REVÊTEMENT PAR PLASMA ASSISTÉ PAR CHAMP MAGNÉTIQUE
Abstract:
(EN) A magnetic-field-assisted plasma coating system (51; 121; 181; 251) and method are provided. In another aspect, a coating system employs a cathode (61; 261) with a linearly moveable magnetic field. A further aspect employs a workpiece (26; 151; 226) as an anode within which is located an elongated cathode which internally coats a bore (23; 223) of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source (69; 123; 269) therein. In yet another aspect, end caps (87; 89; 183; 185) or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.
(FR) L'invention concerne un système de revêtement par plasma assisté par champ magnétique. Dans un autre aspect, un système de revêtement utilise une cathode (61; 261) avec un champ magnétique mobile linéairement. Un autre aspect de l'invention utilise une pièce à usiner (26 ; 151 ; 226) en tant qu'anode à l'intérieur de laquelle se trouve une cathode allongée qui réalise le revêtement intérieur d'un alésage (23 ; 223) de la pièce à usiner. Un autre aspect de la présente invention concerne un système et un procédé utilisant une cathode allongée et creuse avec au moins une source magnétique (69 ; 123 ; 269) à l'intérieur de celle-ci. Selon encore un autre aspect, des embouts (87 ; 89 ; 183 ; 185) ou des plaques scellent une ou plusieurs extrémités ouvertes d'un alésage de pièce à usiner à revêtir, une cathode étant insérée dans l'alésage et un vide étant créé à l'intérieur de l'alésage de telle sorte que la pièce à usiner elle-même définit au moins une portion d'une chambre sous vide.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)