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1. (WO2018225406) METHOD FOR DETERMINING CONFIGURATION OF SURFACE DEFECT INSPECTION DEVICE, CONFIGURATION DETERMINATION DEVICE, CONFIGURATION DETERMINATION PROGRAM, AND RECORDING MEDIUM
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Pub. No.: WO/2018/225406 International Application No.: PCT/JP2018/016391
Publication Date: 13.12.2018 International Filing Date: 23.04.2018
IPC:
G01N 21/88 (2006.01) ,G01B 11/30 (2006.01) ,G03B 15/00 (2006.01) ,H04N 5/225 (2006.01) ,H04N 7/18 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
30
for measuring roughness or irregularity of surfaces
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
B
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
15
Special procedures for taking photographs; Apparatus therefor
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
N
PICTORIAL COMMUNICATION, e.g. TELEVISION
5
Details of television systems
222
Studio circuitry; Studio devices; Studio equipment
225
Television cameras
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
N
PICTORIAL COMMUNICATION, e.g. TELEVISION
7
Television systems
18
Closed-circuit television systems, i.e. systems in which the signal is not broadcast
Applicants:
コニカミノルタ株式会社 KONICA MINOLTA, INC. [JP/JP]; 東京都千代田区丸の内二丁目7番2号 2-7-2, Marunouchi, Chiyoda-ku, Tokyo 1007015, JP
Inventors:
柏原 将人 KASHIHARA, Masato; JP
脇村 泰三 WAKIMURA, Taizo; JP
Agent:
小谷 悦司 KOTANI, Etsuji; JP
小谷 昌崇 KOTANI, Masataka; JP
櫻井 智 SAKURAI, Satoshi; JP
Priority Data:
2017-11329308.06.2017JP
Title (EN) METHOD FOR DETERMINING CONFIGURATION OF SURFACE DEFECT INSPECTION DEVICE, CONFIGURATION DETERMINATION DEVICE, CONFIGURATION DETERMINATION PROGRAM, AND RECORDING MEDIUM
(FR) PROCÉDÉ DE DÉTERMINATION DE CONFIGURATION DE DISPOSITIF D'INSPECTION DE DÉFAUT DE SURFACE, DISPOSITIF DE DÉTERMINATION DE CONFIGURATION, PROGRAMME DE DÉTERMINATION DE CONFIGURATION ET SUPPORT D'ENREGISTREMENT
(JA) 表面欠陥検査装置の配置決定方法、該装置、該プログラムおよび記録媒体
Abstract:
(EN) In the present invention, the respective placement positions and optical axis directions of an illumination unit and imaging unit are set as first and second configuration information; arithmetic is carried out to determine an image that would be obtained by illuminating the object of inspection including a defect using the illumination unit according to the first configuration information and imaging an inspection area using the imaging unit according to the second configuration information, on the basis of information quantifying the illumination unit, imaging unit, and the appearance of the object of inspection; and the defect is detected on the basis of the image. The present invention repeatedly carries out the above processing while changing at least one from among the first and second configuration information and determines the first and second configuration information with the best detection result as the optimal configuration.
(FR) Dans la présente invention, les positions de placement et les directions d'axe optique respectives d'une unité d'éclairage et d'une unité d'imagerie sont définies en tant que premières et deuxièmes informations de configuration; une opération arithmétique est effectuée pour déterminer une image qui serait obtenue par éclairage de l'objet d'inspection comprenant un défaut au moyen de l'unité d'éclairage selon les premières informations de configuration et imagerie d'une zone d'inspection au moyen de l'unité d'imagerie selon les deuxièmes informations de configuration, sur la base d'informations de quantification de l'unité d'éclairage, l'unité d'imagerie et l'aspect de l'objet d'inspection; et le défaut est détecté sur la base de l'image. La présente invention conduit de façon répétée le traitement ci-dessus tout en modifiant au moins l'une parmi les premières et deuxièmes informations de configuration et détermine les premières et deuxièmes informations de configuration avec le meilleur résultat de détection en tant que configuration optimale.
(JA) 本発明は、照明部及び撮像部それぞれの配置位置及び光軸方向を第1及び第2配置情報として設定し、照明部、撮像部及び欠陥を含む被検査物の外観それぞれを数値化した各情報に基づき第1配置情報による照明部で被検査物を照明し第2配置情報による撮像部で検査領域を撮像して得られる画像を数値演算で求め、この画像に基づき欠陥を検出する。本発明は、上記処理を、第1及び第2配置情報の少なくとも一方を変えて複数回実行し、最良の検出結果の第1及び第2配置情報を最適配置として求める。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)