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1. (WO2018224278) MICROMECHANICAL PRESSURE SENSOR ASSEMBLY AND METHOD FOR PRODUCING A MICROMECHANICAL PRESSURE SENSOR ASSEMBLY
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Pub. No.: WO/2018/224278 International Application No.: PCT/EP2018/062880
Publication Date: 13.12.2018 International Filing Date: 17.05.2018
IPC:
G01L 19/06 (2006.01) ,G01L 19/14 (2006.01) ,H01L 23/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19
Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
06
Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19
Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
14
Housings
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
23
Details of semiconductor or other solid state devices
Applicants:
ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart, DE
Inventors:
KNAUSS, Michael; DE
KUELLS, Robert; DE
SCHILLER, Uwe; DE
SODAN, Lars; DE
SCHULER-WATKINS, Sebastian; DE
HAUG, Daniel; DE
Priority Data:
10 2017 209 650.008.06.2017DE
Title (EN) MICROMECHANICAL PRESSURE SENSOR ASSEMBLY AND METHOD FOR PRODUCING A MICROMECHANICAL PRESSURE SENSOR ASSEMBLY
(FR) ENSEMBLE CAPTEUR DE PRESSION MICROMÉCANIQUE ET PROCÉDÉ DE FABRICATION D'UN ENSEMBLE CAPTEUR DE PRESSION MICROMÉCANIQUE
(DE) MIKROMECHANISCHE DRUCKSENSORANORDNUNG UND VERFAHREN ZUM HERSTELLEN EINER MIKROMECHANISCHEN DRUCKSENSORANORDNUNG
Abstract:
(EN) The invention relates to a micromechanical pressure sensor assembly (100), comprising: a substrate (110); a pressure sensor component (120) connected to the substrate (110); and a sleeve structure (130) substantially in the shape of a hollow conical frustum, which sleeve structure is connected to the substrate (110) and at least laterally surrounds the pressure sensor component (120) and has an opening (140) on a side of the sleeve structure (130) facing away from the substrate (110).
(FR) L'invention concerne un ensemble capteur de pression micromécanique (100) comprenant : un substrat (110) ; un composant capteur de pression (120) relié au substrat (110) ; et une structure de gaine (130), sensiblement en forme de cône tronqué creux, qui est reliée au substrat, entoure au moins latéralement le composant capteur de pression (120) et présente une ouverture (140) sur un côté opposé au substrat (110).
(DE) Die Erfindung schafft eine mikromechanische Drucksensoranordnung (100), mit: einem Substrat (110); einem mit dem Substrat (110) verbundenen Drucksensorbauteil (120); und einer im Wesentlichen hohlkegelstumpfförmigen Hülsenstruktur (130), welche mit dem Substrat (110) verbunden ist, welche das Drucksensorbauteil (120) zumindest lateral umgibt und welche an einer von dem Substrat (110) abgewandten Seite der Hülsenstruktur (130) eine Öffnung (140) aufweist.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)