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1. (WO2018224218) METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE
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Pub. No.: WO/2018/224218 International Application No.: PCT/EP2018/061287
Publication Date: 13.12.2018 International Filing Date: 03.05.2018
IPC:
G03F 7/20 (2006.01) ,H01L 21/683 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
DE SIMONE, Giovanna; NL
VAN DEN HEUVEL, Marco, Adrianus, Peter; NL
LAURENT, Thibault, Simon, Mathieu; NL
BLOKS, Ruud, Hendrikus, Martinus, Johannes; NL
ROSET, Niek, Jacobus, Johannes; NL
GERRITZEN, Justin, Johannes, Hermanus; NL
Agent:
DUNG, S.; NL
Priority Data:
17174583.906.06.2017EP
18152220.218.01.2018EP
Title (EN) METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE
(FR) PROCÉDÉ DE DÉCHARGEMENT D'UN OBJET À PARTIR D'UNE TABLE DE SUPPORT
Abstract:
(EN) A method of unloading an object from a support table during an unloading process, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support table under a peripheral portion of the object, wherein during clamping the first pressure and the second pressure are controlled such that liquid is retained between the object and a seal member that is positioned radially between the central region and the peripheral region at an upper surface of the support table and protrudes towards the object, the method comprising: increasing the first pressure towards ambient pressure; removing at least some of the liquid retained between the object and the seal member by decreasing the second pressure; and increasing the second pressure towards the ambient pressure.
(FR) L'invention concerne un procédé de déchargement d'un objet à partir d'une table de support pendant un processus de déchargement, l'objet étant fixé à la table de support pendant un processus d'exposition par : application d'une première pression à une région centrale de la table de support sous une partie centrale de l'objet ; et application d'une seconde pression à une région périphérique de la table de support sous une partie périphérique de l'objet, pendant le serrage, la première pression et la seconde pression étant commandées de telle sorte que le liquide soit retenu entre l'objet et un élément d'étanchéité qui est positionné radialement entre la région centrale et la région périphérique au niveau d'une surface supérieure de la table de support et fait saillie vers l'objet, le procédé comprenant : l'augmentation de la première pression vers la pression ambiante ; l'élimination d'au moins une partie du liquide retenu entre l'objet et l'élément d'étanchéité par diminution de la seconde pression ; et l'augmentation de la seconde pression vers la pression ambiante.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)