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1. (WO2018222771) DRY STRIPPING OF BORON CARBIDE HARDMASK

Pub. No.:    WO/2018/222771    International Application No.:    PCT/US2018/035210
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Thu May 31 01:59:59 CEST 2018
IPC: H01L 21/768
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
Inventors: MANNA, Pramit
JIANG, Shishi
MALLICK, Abhijit Basu
LESCHKIES, Kurtis
Title: DRY STRIPPING OF BORON CARBIDE HARDMASK
Abstract:
Embodiments of the disclosure generally relate to a method for dry stripping a boron carbide layer deposited on a semiconductor substrate. In one embodiment, the method includes loading the substrate with the boron carbide layer into a pressure vessel, exposing the substrate to a processing gas comprising an oxidizer at a pressure between about 500 Torr and 60 bar, heating the pressure vessel to a temperature greater than a condensation point of the processing gas and removing one or more products of a reaction between the processing gas and the boron carbide layer from the pressure vessel.