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1. (WO2018222215) ANNEAL CHAMBER WITH GETTER

Pub. No.:    WO/2018/222215    International Application No.:    PCT/US2017/042866
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Thu Jul 20 01:59:59 CEST 2017
IPC: H01L 21/67
H01L 21/683
Applicants: APPLIED MATERIALS, INC.
Inventors: RANISH, Joseph M.
Title: ANNEAL CHAMBER WITH GETTER
Abstract:
A method and apparatus for thermally processing a substrate is described. The apparatus includes a thermal processing chamber having an interior volume which includes a top portion and a side wall. The apparatus also include a getter assembly comprising a getter configured as a wire disposed in the top portion and extending into the interior volume proximal to the side wall.