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1. (WO2018221850) WARPAGE REDUCTION DEVICE AND WARPAGE REDUCTION METHOD
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Pub. No.: WO/2018/221850 International Application No.: PCT/KR2018/004133
Publication Date: 06.12.2018 International Filing Date: 09.04.2018
IPC:
H01L 21/67 (2006.01) ,H01L 23/00 (2006.01)
[IPC code unknown for H01L 21/67][IPC code unknown for H01L 23]
Applicants:
(주)이오테크닉스 EO TECHNICS CO.,LTD. [KR/KR]; 경기도 안양시 동안구 동편로 91 91, Dongpyeon-ro Dongan-gu, Anyang-si, Gyeonggi-do 13930, KR
Inventors:
정태오 CHUNG, Tai O; KR
정대호 JUNG, Dae Ho; KR
김인수 KIM, In Su; KR
서기홍 SEO, Gi Hong; KR
Agent:
리앤목 특허법인 Y.P.LEE, MOCK & PARTNERS; 서울시 강남구 언주로 30길 13 대림아크로텔 12층 12F Daelim Acrotel, 13 Eonju-ro 30-gil Gangnam-gu, Seoul 06292, KR
Priority Data:
10-2017-006638629.05.2017KR
Title (EN) WARPAGE REDUCTION DEVICE AND WARPAGE REDUCTION METHOD
(FR) DISPOSITIF DE RÉDUCTION DE GAUCHISSEMENT ET PROCÉDÉ DE RÉDUCTION DE GAUCHISSEMENT
(KO) 휨 감소 장치 및 휨 감소 방법
Abstract:
(EN) A warpage reduction device according to the present disclosure comprises: a jig having a curved shape capable of distributing stress in a material; a light source for heating the material so as to flatten the same; a pressurizer for applying pressure to the heated material so as to press the heated material against the jig and thus deform the same; a cooler for cooling the deformed material; and a control unit for controlling operations of the light source, the pressurizer, and the cooler.
(FR) Un dispositif de réduction de gauchissement selon la présente invention comprend : un gabarit ayant une forme incurvée permettant de répartir une contrainte dans un matériau ; une source de lumière permettant de chauffer le matériau de manière à l'aplatir ; un pressuriseur permettant d'appliquer une pression sur le matériau chauffé de manière à presser le matériau chauffé contre le gabarit et donc de le déformer ; un refroidisseur permettant de refroidir le matériau déformé ; et une unité de commande permettant de commander le fonctionnement de la source de lumière, du pressuriseur et du refroidisseur.
(KO) 본 개시에 따른 휨 감소 장치는, 자재의 스트레스를 분산할 수 있는 휘어진 형태를 가지는 지그; 자재를 가열하여 평평하게 만드는 광원; 가열된 자재를 지그에 압착되어 변형되도록 압력을 가하는 가압기; 변형된 자재를 냉각시키는 냉각기; 및 광원, 가압기 및 냉각기의 구동을 제어하는 제어부;를 포함한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)